Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Kasumi Okabe"'
Publikováno v:
Journal of Micro/Nanopatterning, Materials, and Metrology. 21
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ed4cd95f6738a6e1c93fd762cadb8aa2
https://doi.org/10.1117/1.jmm.21.1.011006
https://doi.org/10.1117/1.jmm.21.1.011006
Autor:
Kobayashi, Sachiko, Mitsugi, Satoshi, Kodera, Katsuyoshi, Fukuhara, Kazuya, Mitra, Anupam, Ueha, Koki, Abe, Katsuya, Komori, Motofumi, Kanamitsu, Shingo, Kono, Takuya
Publikováno v:
Proceedings of SPIE; 1/19/2022, Vol. 12052, p1205208-1205208, 1p
Publikováno v:
Journal of Micro/Nanolithography, MEMS & MOEMS; Jan-Mar2022, Vol. 21 Issue 1, p11006-11006, 1p