Zobrazeno 1 - 10
of 155
pro vyhledávání: '"Kary Chien"'
Autor:
Wei-Ting Kary Chien, Feng Hao
Publikováno v:
IEEE Transactions on Device and Materials Reliability. 20:106-118
Advancement in integrated circuit (IC) brings a series of challenges on product reliability. In order to meet these challenges and fulfill customers’ requirements, we introduced the methodology of building-in reliability (BIR) into whole stages dur
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 32:310-319
Identification of the defective patterns of the wafer maps can provide insights for the quality control in the semiconductor wafer fabrication systems (SWFSs). In real SWFSs, the collected wafer maps are usually imbalanced from the defective types, w
Publikováno v:
IEEE Transactions on Device and Materials Reliability. 19:416-425
The static random access memory (SRAM) is generally used in the technology qualification vehicle (TQV) in the semiconductor industries (e.g., assess process maturity and reliability risks). It is well known that the minimum operating voltage shift (
Publikováno v:
IEEE Transactions on Reliability. 68:526-538
The semiconductor manufacturing is one of the most sophisticated processes in modern industries. It contains hundreds of complex operations, and this makes semiconductor reliability a challenging task especially in recent years that integrated circui
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 32:93-103
In modern semiconductor manufacturing, one type of measured particle count data contains excess zeros, and the ratio of zeros in the measurements is usually larger than 50%. This type of particle count sample data cannot be well modeled by popular de
Autor:
Wei-Ting Kary Chien, Yuanzi Lester Yin
Publikováno v:
Journal of Failure Analysis and Prevention. 18:1490-1502
Design for test (DFT) has been widely applied to digital circuit failure analysis (FA) in semiconductor industries. The FA methods based on DFT involve layer-by-layer checks using a polisher and an SEM for defect identification and localization. Yet
Publikováno v:
Microelectronics Reliability. 81:368-372
The ultra-low k dielectrics have been widely used as semiconductor technology steps into 45 nm, 28 nm, and more advanced nodes. Combined with the rapid shrinks of critical dimensions, the ultra-low k dielectrics face challenges to retain the benefits
Autor:
Wei Ting Kary Chien, XiangFu Zhao
Publikováno v:
Microelectronics Reliability. 72:1-4
The effects of baking temperature on back-end-of-line (BEOL) reliability were explored on 28 nm technology node. We found that stress migration (SM) worse temperature showed up around 200 °C and apparent negative resistance (R) shifts appeared after
Publikováno v:
Microelectronics Reliability. 64:220-224
The NBTI (negative bias temperature instability) performance of 28 nm HfO2-based HKMG (high-κ metal gate) I/O thick oxide p-MOSFETs with different I/O oxide processes is reported. The results show that the NBTI performance from ISSG (in-situ steam g
Autor:
Siyuan Frank Yang, Wei-Ting Kary Chien
Publikováno v:
IEEE Transactions on Reliability. 64:1158-1163
In this paper, we report electromigration (EM) reliability optimizations using highly efficient uniform design (UD). Considering the large error that results from using a single lifetime index, and the different EM failure modes, we introduce a new p