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Mikrooptische Elemente, Funktionen und lithographische Herstellungstechnologien

Autor: Kley, E.-B., Tünnermann, A., Zeitner, U.D., Karthe, W.

Today's high-technology applications integrate an increasing number of different functions and at the same time the system size decreases rapidly. Besides others, optical technologies, especially micro-optics, play a key role in this framework. A num

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od_______610::248506f4a9a46e2f7626ed7d18a143b3
https://publica.fraunhofer.de/handle/publica/199999

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Piezoelektrischer Mikrostoßantrieb

Autor: Wehrsdorfer, E., Borchard, G., Pertsch, P., Karthe, W.

Vibrating or micro-shock drive systems utilize the mechanical resonance of piezoelectric actuators. If two mechanical vibrations, acting at right angles to each other, are superimposed, an elliptical movement results which, through the fiction from a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od_______610::37a401673b5e095fd45432310aa882f8
https://publica.fraunhofer.de/handle/publica/193151

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Piezoantrieb mit elektrischer Geschwindigkeitsregelung

Autor: Wehrsdorfer, E., Borchard, G., Karthe, W.

The article presents a concept for controlling the speed of a piezoelectric micro-percussion drive as depicted in [1 ]. Test results have revealed a synchronizing error of delta v/vo of a little as 0.0025 percent in the frequency range from 5 Hz to 5

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od_______610::0ecd0dad91dc5e6a00d5bc55a50679ee
https://publica.fraunhofer.de/handle/publica/193149

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ARROW's in KTiOPO4

Autor: Gehler, J., Karthe, W., Wächter, C., Bräuer, A., Rasch, A., Rottschalk, M.

Antiresonant reflecting optical waveguides (ARROWS) have been designed and fabricated in z-cut KTiOPO4 (KTP) by e-beam direct writing and double Rb K ion exchange. Strong diffusion anisotropy allows the realization of ARROW's in this electrooptical c

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od_______610::8e4f34ecbb93be115b4b0bcbd69aab1e
https://publica.fraunhofer.de/handle/publica/189920

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Remote coupling over 93 mym using ARROW waveguides in strip configuration

Autor: Gehler, J., Bräuer, A., Karthe, W.

A novel waveguide coupler consisting of two antiresonant reflecting optical waveguides in strip-configuration has been developed on Si-SiO2-SiON basis. Remote coupling over a distance of 93 mym has been demonstrated experimentally.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od_______610::3da439c4d34b9d4eb12e5a128a951a71
https://publica.fraunhofer.de/handle/publica/185178

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Antiresonant reflecting optical waveguides in strip configuration

Autor: Gehler, J., Bräuer, A., Karthe, W.

A monomode antiresonant reflecting optical strip waveguide has been realized in SiON/SiO2/Si. The lateral confinement is provided by strip-loaded reflectors fabricated by e-beam direct writing and reactive ion beam etching (RIBE).

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od_______610::cf42113dc771ed3a3e7da334b812601b
https://publica.fraunhofer.de/handle/publica/184172

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