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pro vyhledávání: '"Kapitov, A."'
Publikováno v:
In Surface & Coatings Technology 1 October 2005 200(1-4):809-813
Publikováno v:
In Surface & Coatings Technology 2003 174:918-921
Autor:
A. Kapitov, Rainer Hippler, Holger Kersten, M. Hannemann, Frank Scholze, Horst Neumann, Ruben Wiese
Publikováno v:
Surface and Coatings Technology. 200:809-813
For optimization and adjustment of ion beam sources in surface application, knowledge of physical beam parameters and plasma processes in the ion source has to be provided by suitable diagnostics. For this purpose, novel–but relatively simple (and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::be3751b6dc0f252c7b0563b0e54c475f
https://doi.org/10.1016/j.surfcoat.2005.02.173
https://doi.org/10.1016/j.surfcoat.2005.02.173
Publikováno v:
Surface and Coatings Technology. :918-921
The radial distribution of the energy influx by a broad Ar ion beam towards a substrate surface has been determined. The procedure is based on the measurement of temporal slope of a thermal probe (substrate) during beam operation. The deposited power
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::baa00863a3886dd336e6f6a02faa10b8
https://doi.org/10.1016/s0257-8972(03)00324-4
https://doi.org/10.1016/s0257-8972(03)00324-4
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