Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Kaoru Sakota"'
Autor:
Nobuyoshi Kobayashi, Katsumi Yoneda, Kaoru Sakota, Takahisa Ohno, Minoru Inoue, Tomoyuki Hamada, Nobuo Tajima, Kazuhiro Miyazawa, Yoshiaki Inaishi, Manabu Shinriki, Satoshi Hasaka, Seiichi Kondo
Publikováno v:
Japanese Journal of Applied Physics. 46:5970-5974
We have computationally explored the chemical structures of carbon-doped silicon oxide (SiOCH) films that give the smallest dielectric constant (k) under the required mechanical strength for low-k dielectrics. The focus of this study is on the SiOCH
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::653dfb1f12df7383f3da3ff236466c6e
https://doi.org/10.1143/jjap.46.5970
https://doi.org/10.1143/jjap.46.5970
Autor:
Minoru Inoue, Kaoru Sakota, Katsumi Yoneda, Satoshi Hasaka, Tomoyuki Hamada, Nobuo Tajima, Takahisa Ohno, Kazuhiro Miyazawa, Seiichi Kondo, Manabu Shinriki, Nobuyoshi Kobayashi
Publikováno v:
Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8b35866ac1bb6f751e63d8ed59c36513
https://doi.org/10.7567/ssdm.2006.g-2-2
https://doi.org/10.7567/ssdm.2006.g-2-2