Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Kaolin Chiong"'
Publikováno v:
SPIE Proceedings.
Several negative resists which are capable of submicron resolution and high sensitivity using projection printers for one-micron design groundrules have been formulated. In these resists, aryl azides act as photoactive components and aqueous-base dev
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::99651dee381e5732e8dc5d18e0a79237
https://doi.org/10.1117/12.941785
https://doi.org/10.1117/12.941785
