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pro vyhledávání: '"Kannan, Akila"'
Autor:
Kannan, Akila
This thesis reports the design and modelling of a MEMS (Micro Electro Mechanical system) based inertial accelerometer. The main motivation to design a differential type of accelerometer is that such a kind of structure allows differential electrostat
Externí odkaz:
http://hdl.handle.net/2429/4165
Publikováno v:
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
This paper presents a detailed noise analysis and a noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena at micro s
Externí odkaz:
http://arxiv.org/abs/0805.0927