Zobrazeno 1 - 10
of 45
pro vyhledávání: '"Kanervo, Jaana"'
Publikováno v:
In Applied Catalysis B: Environment and Energy 15 December 2016 199:45-54
Publikováno v:
In Applied Catalysis B: Environment and Energy 15 December 2016 199:523-530
Publikováno v:
In Applied Catalysis A, General 25 September 2016 526:183-190
Publikováno v:
In Chemical Engineering Science 1 December 2015 137:740-751
Autor:
Viinikainen, Tiia, Kauppi, Inkeri, Korhonen, Satu, Lefferts, Leon, Kanervo, Jaana, Lehtonen, Juha
Publikováno v:
In Applied Catalysis B: Environment and Energy October-November 2013 142-143:769-779
Autor:
Kouva, Sonja, Kanervo, Jaana, Schüβler, Florian, Olindo, Roberta, Lercher, Johannes A., Krause, Outi
Publikováno v:
In Chemical Engineering Science 15 February 2013 89:40-48
Autor:
Kanervo, Jaana M., Krause, A.Outi I.
Publikováno v:
In Journal of Catalysis 1 April 2002 207(1):57-65
Autor:
Ahvenniemi, Esko, Akbashev, Andrew R., Ali, Saima, Bechelany, Mikhael, Berdova, Maria, Boyadjiev, Stefan, Cameron, David C., Chen, Rong, Chubarov, Mikhail, Cremers, Veronique, Devi, Anjana, Drozd, Viktor, Elnikova, Liliya, Gottardi, Gloria, Grigoras, Kestutis, Hausmann, Dennis M., Hwang, Cheol Seong, Jen, Shih-Hui, Kallio, Tanja, Kanervo, Jaana, Khmelnitskiy, Ivan, Kim, Do Han, Klibanov, Lev, Koshtyal, Yury, Krause, A. Outi I., Kuhs, Jakob, Kaerkkaenen, Irina, Kaariainen, Marja-Leena, Kääriäinen, Tommi, Lamagna, Luca, Lapicki, Adam A., Leskelä, Markku, Lipsanen, Harri, Lyytinen, Jussi, Malkov, Anatoly, Malygin, Anatoly, Mennad, Abdelkader, Militzer, Christian, Molarius, Jyrki, Norek, Malgorzata, Ozgit-Akgun, Cagla, Panov, Mikhail, Pedersen, Henrik, Piallat, Fabien, Popov, Georgi, Puurunen, Riikka L., Rampelberg, Geert, Ras, Robin H. A., Rauwel, Erwan, Roozeboom, Fred, Sajavaara, Timo, Salami, Hossein, Savin, Hele, Schneider, Nathanaelle, Seidel, Thomas E., Sundqvist, Jonas, Suyatin, Dmitry B., Torndahl, Tobias, van Ommen, J. Ruud, Wiemer, Claudia, Ylivaara, Oili M. E., Yurkevich, Oksana
Atomic layer deposition (ALD), a gas-phase thin film deposition technique based on repeated, self-terminating gas-solid reactions, has become the method of choice in semiconductor manufacturing and many other technological areas for depositing thin c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od______1593::af01abeadebbe96339dd544822489a20
http://hdl.handle.net/10138/313116
http://hdl.handle.net/10138/313116
Akademický článek
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Autor:
Aarik, Jaan, Ahvenniemi, Esko, Akbashev, Andrew R., Ali, Saima, Bechelany, Mikhael, Berdova, Maria, Cameron, David, Chekurov, Nikolai, Chubarov, Mikhail, Drozd, Viktor, Elliott, Simon, Gottardi, Gloria, Grigoras, Kestutis, Hwang, Cheol Seong, Junige, Marcel, Kallio, Tanja, Kanervo, Jaana, Khmelnitskiy, Ivan, Koshtyal, Yury, Krause, Outi, Kääriäinen, Marja-Leena, Kääriäinen, Tommi, Lamagna, Luca, Lipsanen, Harri, Lyytinen, Jussi, Malkov, Anatoly, Malygin, Anatoly, Molarius, Jyrki, Norek, Malgorzata, Ozgit-Akgun, Cagla, Panov, Mikhail, Pedersen, Henrik, Piallat, Fabien, Popov, Georgi, Puurunen, Riikka L., Pyymaki-Perros, Alexander, Ras, Robin H. A., Roozeboom, Fred, Sajavaara, Timo, Savin, Hele, Seidel, Thomas E., Sundberg, Pia, Sundqvist, Jonas, Suyatin, Dmitry, Tallarida, Massimo, Törndahl, Tobias, Utriainen, Mikko, van Ommen, J. Ruud, Wächtler, Thomas, Wiemer, Claudia, Ylivaara, Oili M. E., Yurkevich, Oksana
Publikováno v:
Aarik, J, Ahvenniemi, E, Akbashev, A R, Ali, S, Bechelany, M, Berdova, M, Cameron, D, Chekurov, N, Chubarov, M, Drozd, V, Elliott, S, Gottardi, G, Grigoras, K, Hwang, C S, Junige, M, Kallio, T, Kanervo, J, Khmelnitskiy, I, Koshtyal, Y, Krause, O, Kääriäinen, M-L, Kääriäinen, T, Lamagna, L, Lipsanen, H, Lyytinen, J, Malkov, A, Malygin, A, Molarius, J, Norek, M, Ozgit-Akgun, C, Panov, M, Pedersen, H, Piallat, F, Popov, G, Puurunen, R L, Pyymaki-Perros, A, Ras, R H A, Roozeboom, F, Sajavaara, T, Savin, H, Seidel, T E, Sundberg, P, Sundqvist, J, Suyatin, D, Tallarida, M, Törndahl, T, Utriainen, M, van Ommen, J R, Wächtler, T, Wiemer, C, Ylivaara, O M E & Yurkevich, O 2016, ' On the early history of atomic layer deposition : most significant works and applications ', 16th International Conference on Atomic Layer Deposition, ALD 2016, Dublin, Ireland, 24/07/16-27/07/16 .
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=355e65625b88::3b2b52ef81afcdd0edebc708b823184f
https://cris.vtt.fi/en/publications/03707523-8c1a-4bbc-8828-d8f850920e09
https://cris.vtt.fi/en/publications/03707523-8c1a-4bbc-8828-d8f850920e09