Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Kaname Izumi"'
Autor:
Kenji Tsujikawa, Takahiro Kawakami, Wataru Araki, Takahiro Sato, Sayo Ito, Kaname Izumi, Koki Hotoda, Yuko T. Iwata
Publikováno v:
Japanese Journal of Forensic Science and Technology.
Autor:
Takeyasu Saito, Kaname Izumi, Norifumi Fujimura, Kazuo Kondo, Yuichiro Hirota, Takeshi Yoshimura, Naoki Okamoro
Publikováno v:
ECS Transactions. 25:693-698
Amorphous carbon (α-C) films were deposited on PbLaZrTiOx (PLZT) capacitors by a radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method. The α-C films of 20nm prepared with different deposition pressure, methane concentration a