Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Kamal N. Bhatia"'
Autor:
Srinivasan Rangarajan, Ray H. Chiao, Kamal N. Bhatia, J. Scott Hodges, Robert M. Peters, Yu-Lun Chris Lin, Suresh Lakkapragada, Dale R. Burrows
Publikováno v:
SPIE Proceedings.
The ability to control the cross-sectional profile of polysilicon gate structures on semiconductor devices is paramount to maximize product yield and transistor performance. Tighter control of gate profile parameters leads to a tighter distribution o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bbd6dd80cb0d48f5dbe2fea0f57f51eb
https://doi.org/10.1117/12.485002
https://doi.org/10.1117/12.485002
Autor:
Christopher C. Baum, Marco Guevremont, Suresh Lakkapragada, Umar K. Whitney, Kamal N. Bhatia, Vladimir A. Ukraintsev, Mak Kulkarni, Pedro Herrera, Karen H. R. Kirmse
Publikováno v:
SPIE Proceedings.
A systematic study has been conducted to evaluate accuracy and precision of spectral scatterometry used for two-dimensional (2D) characterization of trenches formed in fluorinated silicon glass (FSG). Experiments were done on short-flow dual-damascen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::88f437af04d69cb5a34f0fb75132b81e
https://doi.org/10.1117/12.473457
https://doi.org/10.1117/12.473457