Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Kallis KT"'
Publikováno v:
Journal of Nanoscience and Nanotechnology. 10:6046-6048
The availability of multiple metal layers has become essential for high-density layouts and economic chip size. The presented paper describes an efficient and low-cost alternative to Chemical-Mechanical-Polishing (CMP). The method uses an auxiliary w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::493232adeda4aeebdb97174e12404bff
https://doi.org/10.1166/jnn.2010.2576
https://doi.org/10.1166/jnn.2010.2576
Publikováno v:
Journal of nanoscience and nanotechnology. 10(9)
This Nano-Fin-Sensor bases on a lithography-independent technology-process, enabling research on Nano-Sensors without cost-intensive technology-equipment. Background for the sensor described within this paper is the high pollution with mercury of the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1b2d9a59285f5bdcdc216388f752ce15
https://pubmed.ncbi.nlm.nih.gov/21133129
https://pubmed.ncbi.nlm.nih.gov/21133129
Autor:
Kontis C; TU Dortmund University, Emil-Figge Strasse 68, 44227 Dortmund, Germany., Mueller MR, Kuechenmeister C, Kallis KT, Knoch J
Publikováno v:
Applied optics [Appl Opt] 2012 Jan 20; Vol. 51 (3), pp. 385-9.
Autor:
Poloczek RR; Intelligent Microsystems Institute, Faculty of Electrical Engineering, TU Dortmund Emil-Figge-Str. 68, D-44227 Dortmund, Germany., Keller LO, Kallis KT, Fiedler HL
Publikováno v:
Journal of nanoscience and nanotechnology [J Nanosci Nanotechnol] 2010 Sep; Vol. 10 (9), pp. 6046-8.