Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Kaito Arai"'
Autor:
Yuki Ono, Ryo Ito, Kaito Arai, Gurdeep Singh, Tsuyoshi Saitoh, Robert B. Russell, Francesco Raimondi, Junken Aoki, Juro Sakai, Asuka Inoue
Publikováno v:
Signal Transduction and Targeted Therapy, Vol 8, Iss 1, Pp 1-4 (2023)
Externí odkaz:
https://doaj.org/article/2dd83316b56b4837ab140d0eb22252e2
Publikováno v:
Procedia Engineering. 120:1205-1208
Intrinsic stress of sol-gel derived lead-zirconate-titanate (PZT) films has been investigated from the viewpoint of diaphragm buck- ling behavior for highly sensitive structures of piezoelectric ultrasonic microsensors. Since upward-buckled diaphragm
Publikováno v:
2015 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK).
Piezoelectric diaphragm-type ultrasonic microsensors were fabricated and their vibration modes were investigated from the viewpoint of sensitivity affected by the distribution of piezoelectrically induced polarization. Three kinds of diaphragms were
Publikováno v:
2015 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF), International Symposium on Integrated Functionalities (ISIF), and Piezoelectric Force Microscopy Workshop (PFM).
Buckling behavior of silicon-micro machined diaphragm structures was investigated for highly sensitive structures of piezoelectric ultrasonic microsensors from the viewpoint of intrinsic stress of sol-gel derived lead-zirconate-titanate (PZT) films.