Zobrazeno 1 - 10
of 23
pro vyhledávání: '"Kaihsiang Yen"'
Autor:
Kaihsiang Yen, 顏凱翔
87
This work fabricates micromachined microwave switches on GaAs and Si substrates. The difficulties of process are decreased by only needing one mask. Another microwave switch uses the conventional CMOS process. This switch is fully compatible
This work fabricates micromachined microwave switches on GaAs and Si substrates. The difficulties of process are decreased by only needing one mask. Another microwave switch uses the conventional CMOS process. This switch is fully compatible
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/69003016170901202734
Applied electrostatic parallelogram actuators for microwave switches using the standard CMOS process
Publikováno v:
Journal of Micromechanics and Microengineering. 11:697-702
This paper presents the fabrication of a laminated-suspension microwave switch using a conventional 0.6 µm single polysilicon three metals complementary metal-oxide semiconductor process. The post-processing is completed with maskless dry etching. T
Autor:
Kaihsiang Yen, Honglin Chen, Jing-Hung Chiou, Jenn-Yi Chen, Chienliu Chang, Ching-Liang Dai, Pei-Zen Chang
Publikováno v:
Journal of the Chinese Institute of Engineers. 23:781-787
An electrostatic microwave switch has been implemented by applying surface micromachining processes. The substrate of the microwave switch is gallium arsenide (GaAs). The structure of the microwave switch contains a gold coplanar waveguide and a susp
Publikováno v:
Journal of Intelligent Material Systems and Structures. 9:95-103
This study presents a novel means of simplifying the design process of micro machined deformable mirrors. Varying the widths of an array of constant-pitched electrodes allows us to precisely control the electrostatic-force profile needed to shape the
Autor:
Ping-Hei Chen, Kaihsiang Yen, Fu-Yuan Xiao, Chi-Yuan Lee, Ching-Liang Dai, Lung-Jieh Yang, Yung-Yu Chen, Tsung-Tsong Wu, Chih-Kung Lee, Shih-Yung Pao, Shui-Shong Lu, Pei-Zen Chang, Chih-Wei Liu, Wen-Jong Chen, Ying-Chou Cheng
Publikováno v:
IEEE International Frequency Control Sympposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003.
This work presents a novel method based on the surface acoustic wave (SAW) device for monitoring in-situ the thickness of quartz membrane during batch chemical etching. Similar to oscillators and resonators, some SAW devices require the thickness of
Autor:
Chienliu Chang, Kaihsiang Yen, Pei-Zen Chang, Ching-Yi Wu, Hung-Lin Chen, Jinhung Chio, Huiwen Huang
Publikováno v:
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).
This investigation proposes a novel planar angular rotator fabricated by the conventional CMOS process. Following the 0.6 /spl mu/m SPTM (single poly triple metal) CMOS process, the device is completed by a simple post-process with maskless etching.
Autor:
Chienliu Chang, Hung-Lin Chen, Huiwen Huang, Jinhung Chio, Pei-Zen Chang, Ching-Liang Dai, Kaihsiang Yen
Publikováno v:
Optoelectronic Materials and Devices II.
This investigation presents a novel type of DOEs fabricated by the conventional CMOS process. A simple post-CMOS process is applied to form the relief pattern, which can be used directly for its optical properties or serve as a mold for the subsequen
Autor:
Pei-Zen Chang, Kaihsiang Yen, Ching-Liang Dai, Chienliu Chang, Hung-Lin Chen, Huiwen Huang, Jinhung Chio
Publikováno v:
Optoelectronic Materials and Devices II.
This investigation presents a concept of integrated device, which tracks the movement of eyeball in real time. Integratedoptical components are applied to perform infrared oculography to find the position of eyeball. First, the photodiodes emitsinfra
Autor:
Hung-Lin Chen, Pei-Zen Chang, Ching-Liang Dai, Jinhung Chio, Kaihsiang Yen, Huiwen Huang, Chienliu Chang
Publikováno v:
Optoelectronic Materials and Devices II.
This investigation presenst a micromachined optical modulator with electrostatic actuation fabricated by the conventional CMOS process. The modulator is operated by interaction of fixed part, stationary gratings, and movable part, sliding gratings. T
Publikováno v:
SPIE Proceedings.
This work fabricates a laminated-suspension microwave switch using the conventional CMOS process. The proposed microwave switch is fully compatible with an IC foundry service, and the post-process is completed with maskless dry-etching. In addition,