Zobrazeno 1 - 10
of 13
pro vyhledávání: '"Kaehler, Dirk"'
Publikováno v:
In Handbook of Silicon Based MEMS Materials and Technologies Edition: Third Edition. 2020:833-843
Publikováno v:
In Physica E: Low-dimensional Systems and Nanostructures 2004 21(2):435-439
Publikováno v:
In Handbook of Silicon Based MEMS Materials and Technologies Edition: Second Edition. 2016:734-743
Autor:
Aalto, Timo, Airaksinen, Veli-Matti, Albert, Stephan Gerhard, Allegato, Giorgio, Amiotti, Marco, Anttila, Olli, Auersperg, Juergen, Bonucci, Antonio, Bose, Indranil Ronnie, Braun, Tanja, Broas, Mikael, Burggraf, J., Cameron, Christopher, Candler, Rob N., Cao, Zhen, Cardoso, André, Chen, Kuo-Shen, Conte, Andrea, Cozma, Adriana, Davis, Cristina E., Dempwolf, Sophia, Dixit, Pradeep, Dost, Michael, Dragoi, Viorel, Eränen, Simo, Fain, Bruno, Figeys, B., Fischer, Andreas C., Flötgen, Christoph, Franssila, Sami, Friedberger, Alois, Fueldner, Marc, Ganchenkova, Maria, Gonzalez, Pilar, Gosálvez, Miguel A., Grimes, Michael, Haapalinna, Atte, Hagelin, Paul, Hammond, Paul, Henttinen, Kimmo, Henttonen, Vesa, Horsley, David, Hoshi, Takeo, Itoh, Satoshi, Jakobsen, Henrik, Jansen, R., Jonsson, Kerstin, Kähler, Dirk, Kannojia, Harindra Kumar, Kattelus, Hannu, Kissinger, Gudrun, Knechtel, Roy, Knese, Kathrin, Kolari, Kai, Koskenvuori, Mika, Kuisma, Heikki, Kulkarni, Amit, Laermer, Franz, Landesberger, Christof, Leinenbach, Christina, LeVasseur, Michael K., Li, Jue, Lin, Yuyuan, Lindner, Paul F., Lodewijks, K., Lofink, Fabian, Longoni, Giorgio, Luber, Sebastian Markus, Mahmud-ul-hasan, M., Mäkinen, Jari, Mäntysalo, Matti, Martin, Devin, Maspero, Federico, Mattila, Toni T., Mauri, Luca, Merz, Peter, Meyer, Doug, Moraja, Marco, Motooka, Teruaki, Müller, Gerhard, Muralt, Paul, Nieminen, Risto M., Niklaus, Frank, Oggioni, Laura, Olkkonen, Juuso, Österlund, Elmeri, Ou, Kuang-Shun, Paloheimo, Jari, Pasanen, Toni P., Paulasto-Kröckel, Mervi, Plach, Thomas, Polizzi, Jean-Philippe, Pressel, Klaus, Putkonen, Matti, Puurunen, Riikka L., Reinert, Wolfgang, Rizzi, Enea, Rochus, V., Ross, Glenn, Rottenberg, X., Sainiemi, Lauri, Savin, Hele, Schenk, Harald, Schikowski, Marc, Schulze, Matthias, Seema, S., Severi, S., Skogström, Lasse, Suga, Tadatomo, Sullivan, Scott, Suni, Tommi, Theuss, Horst, Tilli, Markku, Tilmans, H.A.C., Tittonen, Ilkka, Tofteberg, Hannah, Törmä, Pekka, Tuomikoski, Santeri, Tyholdt, Frode, Uda, Tsuyoshi, Vallin, Örjan, Valzasina, Carlo, Veijola, Timo, Viinikka, Eeva, Vogel, Dietmar, Vogl, Andreas, Vuorinen, Vesa, Westervelde, W.J., Wicht, Sebastian, Wieland, Robert, Winkler, Bernhard, Yobas, Levent, Zanotti, Luca, Zubel, I.
Publikováno v:
In Handbook of Silicon Based MEMS Materials and Technologies Edition: Third Edition. 2020:xv-xvii
Publikováno v:
In Physica E: Low-dimensional Systems and Nanostructures 2003 17:284-285
Autor:
Reinert, Wolfgang, Kähler, Dirk
Publikováno v:
In Handbook of Silicon Based MEMS Materials and Technologies 2010:607-616
Autor:
Aalto, Timo, Airaksinen, Veli-Matti, Amiotti, Marco, Anttila, Olli, Bonucci, Antonio, Brudziński, K., Candler, Rob N., Cao, Zhen, Chen, Kuo-Shen, Conte, Andrea, Davis, Cristina E., Dixit, Pradeep, Dragoi, Viorel, Eränen, Simo, Fischer, Andreas C., Franssila, Sami, Friedberger, Alois, Ganchenkova, Maria, Gonzalez, Pilar, Gosálvez, Miguel A., Gronicz, J., Haapalinna, Atte, Hagelin, Paul M., Hammond, Paul, Henttinen, Kimmo, Horsley, David, Inoue, Akihisa, Jakobsen, Henrik, Jonsson, Kerstin, Kähler, Dirk, Kattelus, Hannu, Knechtel, Roy, Knese, Kathrin, Kolari, Kai, Koskenvuori, Mika, Kuisma, Heikki, Kulkarni, Amit, Laermer, Franz, Lapadatu, Adriana Cozma, Leinenbach, Christina, LeVasseur, Michael K., Li, Jue, Lindner, Paul, Lindroos, Veikki, Lofink, Fabian, Longoni, Giorgio, Mäkinen, Jari, Mäntysalo, Matti, Martin, Devin, Mattila, Toni, Mauri, Luca, Merz, Peter, Meyer, Doug, Moraja, Marco, Motooka, Teruaki, Müller, Gerhard, Muralt, Paul, Nagao, S., Nieminen, Risto M., Niklaus, Frank, Nowak, R., Olkkonen, Juuso, Ou, Kuang-Shun, Paloheimo, Jari, Paulasto-Kröckel, Mervi, Pohjonen, Helena, Pressel, Klaus, Putkonen, Matti, Puurunen, Riikka L., Reinert, Wolfgang, Rizzi, Enea, Rottenberg, Xavier, Ryhänen, Tapani, Sainiemi, Lauri, Savin, Hele, Sharma, Parmanand, Sullivan, Scott, Suni, Tommi, Theuss, Horst, Tilli, Markku, Tittonen, Ilkka, Tofteberg, Hannah, Törmä, Pekka, Tuomikoski, Santeri, Tyholdt, Frode, Uda, Tsuyoshi, Vallin, Örjan, Veijola, Timo, Viinikka, Eeva, Vogl, Andreas, Vuorinen, Vesa, Yobas, Levent, Zachariasz, P., Zubel, I.
Publikováno v:
In Handbook of Silicon Based MEMS Materials and Technologies Edition: Second Edition. 2016:xiii-xv
Publikováno v:
IECON 2014 - 40th Annual Conference of the IEEE Industrial Electronics Society; 2014, p2192-2198, 7p
Akademický článek
Tento výsledek nelze pro nepřihlášené uživatele zobrazit.
K zobrazení výsledku je třeba se přihlásit.
K zobrazení výsledku je třeba se přihlásit.
Autor:
Aalto, Timo, Airaksinen, Veli-Matti, Amiotti, Marco, Anttila, Olli, Anzalone, Paul A., Bhushan, Abhinav, Bonucci, Antonio, Bruzdzinski, Jakub, Candler, Robert, Chen, Kuo-Shen, Conte, Andrea, Davis, Cristina, Dragoi, Viorel, Eränen, Simo, Franssila, Sami, Friedberger, Alois, Ganchenkova, Maria, Giannuzzi, Lucille, Gosálvez, Miguel, Gronicz, Jakub, Haapalinna, Atte, Haimi, Eero, Henttinen, Kimmo, Horsley, David, Inoue, Akihisa, Jakobsen, Henrik, Jonsson, Kerstin, Kähler, Dirk, Kattelus, Hannu, Knechtel, Roy, Knese, Kathrin, Kolari, Kai, Koskenvuori, Mika, Kuisma, Heikki, Lapadatu, Adriana, Laermer, Franz, Van Leer, Brandon, Lehto, Ari, Leinenbach, Christina, Lindner, Paul, Lindroos, Veikko, Longoni, Giorgio, Mäkinen, Jari, Merz, Peter, Meyer, Douglas J., Moraja, Marco, Motooka, Teruaki, Müller, Gerhard, Nagao, Shijo, Nieminen, Risto, Nowak, Roman, Olkkonen, Juuso, Ou, Kuang-Shun, Paloheimo, Jari, Puurunen, Riikka, Reinert, Wolfgang, Reyntjens, Steve, Ryhänen, Tapani, Sainiemi, Lauri, Savin, Hele, Seidel, Helmut, Sharma, Parmanand, Sullivan, Scott, Suni, Tommi, Suntola, Tuomo, Tilli, Markku, Tittonen, Ilkka, Tuomikoski, Santeri, Vallin, Örjan, Veijola, Timo, Viinikka, Eeva, Wilhelmi, Oliver, Zachariasz, Piotr, Zubel, Irena
Publikováno v:
In Handbook of Silicon Based MEMS Materials and Technologies 2010:xi-xiii