Zobrazeno 1 - 10
of 55
pro vyhledávání: '"K.J. Winchester"'
Autor:
K. K. M. B. D. Silva, Adrian Keating, Jeffrey D. Beck, Pradip Mitra, C.A. Musca, Jaroslaw Antoszewski, K.J. Winchester, T. Nguyen, J. E. Robinson, M. R. Skokan, John Dell, Lorenzo Faraone
Publikováno v:
Journal of Electronic Materials. 37:1811-1820
Microspectrometers based on the monolithic integration of a microelectromechanical system (MEMS) Fabry–Perot filter and a HgxCd1–xTe-based infrared detector are discussed and measured results presented. The microspectrometers are designed to oper
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7f7d80bafc625bc1d2c6ea85aaf29324
https://doi.org/10.1007/s11664-008-0526-0
https://doi.org/10.1007/s11664-008-0526-0
Autor:
K.J. Winchester, Yong Liu, Lorenzo Faraone, Alexandra Suvorova, Xiao Hu, Han Huang, Brian R. Lawn, John Dell
Publikováno v:
Materials Science and Engineering: A. :453-459
The effect of deposition conditions on characteristic mechanical properties – elastic modulus and hardness – of low-temperature PECVD silicon nitrides is investigated using nanoindentation. It is found that increase in substrate temperature, incr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7c520cf5c644df837825d096a72a8bce
https://doi.org/10.1016/j.msea.2006.07.015
https://doi.org/10.1016/j.msea.2006.07.015
Publikováno v:
Journal of Micromechanics and Microengineering. 16:2177-2182
The aim of this work was to develop an alignment technique to be used in the production of long, deep, large area microchannel devices. The microchannel design specifications used for the investigation were 800 µm deep channels of 100 µm width, wit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fcc0f2a7e82228a8cec336b2eb510875
https://doi.org/10.1088/0960-1317/16/10/034
https://doi.org/10.1088/0960-1317/16/10/034
Autor:
Jeffrey D. Beck, T. Nguyen, Adrian Keating, J. E. Robinson, K. K. M. B. D. Silva, K.J. Winchester, Lorenzo Faraone, John Dell, Pradip Mitra, M. R. Skokan, Jaroslaw Antoszewski, C.A. Musca
Publikováno v:
Scopus-Elsevier
A monolithically integrated low-temperature micro-electro-mechanical systems (MEMS) and HgCdTe infrared (IR) detector technology is introduced, implemented, and characterized. The ultimate aim of this project is to develop a MEMS-based optical filter
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4fa7dae806d361af81ffa07ff258cbe8
https://doi.org/10.1007/s11664-005-0009-5
https://doi.org/10.1007/s11664-005-0009-5
Publikováno v:
Journal of Micromechanics and Microengineering. 15:608-614
This paper reports an investigation on techniques for determining elastic modulus and intrinsic stress gradient in plasma-enhanced chemical vapor deposition (PECVD) silicon nitride thin films. The elastic property of the silicon nitride thin films wa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::731aa56564a61e0b7ac5794848ac2f94
https://doi.org/10.1088/0960-1317/15/3/024
https://doi.org/10.1088/0960-1317/15/3/024
Publikováno v:
NIR news. 15:11-15
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::46f70b457c1928b347902c169a258ada
https://doi.org/10.1255/nirn.778
https://doi.org/10.1255/nirn.778
Autor:
K.J. Winchester, John Dell
Publikováno v:
Journal of Micromechanics and Microengineering. 11:589-594
The construction of self-supporting and suspended structures is one of the fundamental challenges of microelectromechanical systems (MEMS). Many technologies have been developed for the fabrication of such structures, which can be categorized into bu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b57ba70cac71dd8a0d0a5f241986b8dd
https://doi.org/10.1088/0960-1317/11/5/323
https://doi.org/10.1088/0960-1317/11/5/323
Publikováno v:
Semiconductor Science and Technology. 16:455-462
A fabrication procedure using dry plasma process technology has been developed for HgCdTe photoconductive detectors. Dry plasma, in the form of CH4/H2 reactive ion etching, was used in a multi-functional process capacity after the mesa delineation of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::15dbfd1aa70f46e8f18442762e4dd6e9
https://doi.org/10.1088/0268-1242/16/6/306
https://doi.org/10.1088/0268-1242/16/6/306
Autor:
T. Nguyen, J.D. Beck, P. Mitra, K. K. M. B. D. Silva, Lorenzo Faraone, J.E. Robinson, John Dell, Jaroslaw Antoszewski, K.J. Winchester, Adrian Keating, C.A. Musca, M.R. Skokan
Publikováno v:
IEEE Electron Device Letters. 26:888-890
The monolithic integration of a low-temperature microelectromechanical system (MEMS) and HgCdTe infrared detector technology has been implemented and characterized. The MEMS-based tunable optical filter, integrated with an infrared detector, selects
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2d0de6043c155a668afd8c99b2e87cea
https://doi.org/10.1109/led.2005.859651
https://doi.org/10.1109/led.2005.859651
Autor:
T. Nguyen, L. Faraone, K. K. M. B. D. Silva, C.A. Musca, John Dell, K.J. Winchester, Adrian Keating, Jaroslaw Antoszewski
Publikováno v:
2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics.
Micro-electro-mechanical systems (MEMS)-based tunable optical filters, integrated with an infrared detector, select narrow wavelength bands in either the short-wavelength infrared (SWIR), or the mid-wavelength infrared (MWIR) region of the electromag
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::40c2c2e0741dc74f18344548025c3d03
https://doi.org/10.1109/omems.2007.4373878
https://doi.org/10.1109/omems.2007.4373878