Zobrazeno 1 - 10
of 81
pro vyhledávání: '"K.J. Gabriel"'
Autor:
K.J. Gabriel, J.J. Neumann
Publikováno v:
Sensors and Actuators A: Physical. 95:175-182
Using CMOS-MEMS micromachining techniques we have constructed a prototype earphone that is audible from 1 to 15 kHz. The fabrication of the acoustic membrane consists of only two steps in addition to the prior post-CMOS micromachining steps developed
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6cb90425e99349dc8688f60eefb0019c
https://doi.org/10.1016/s0924-4247(01)00728-2
https://doi.org/10.1016/s0924-4247(01)00728-2
Autor:
K.J. Gabriel, K.W. Markus
Publikováno v:
Computer. 32:25-31
Information systems are no longer confined to desktops but are rapidly becoming part of cars, personal digital assistants, and palmtop systems. In this context, systems must be able not only to compute but also to sense their physical environment and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::963d44aaa37de6fb0ef49332ec88fbf4
https://doi.org/10.1109/2.796105
https://doi.org/10.1109/2.796105
Autor:
Andrew A. Berlin, K.J. Gabriel
Publikováno v:
IEEE Computational Science and Engineering. 4:12-16
How do you program a cloud of dust? That is just one computational challenge posed by MEMS, a technology in which multitudes of interacting tiny machines can add computational behavior to materials and the environment in an embedded, massively distri
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d84e9e7d3f9abc5adc4c174b35f91aee
https://doi.org/10.1109/99.590851
https://doi.org/10.1109/99.590851
Autor:
K.J. Gabriel, Z.J. Lemnios
Publikováno v:
IEEE Design & Test of Computers. 11:8-13
Plans for a government sponsored research program call for the development of a new electronics technology base for hand-size information systems. This base will enable the design and implementation of semiconductor technologies that consume two orde
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7a73b6c5e59f15f183c0b4441c62a809
https://doi.org/10.1109/54.329446
https://doi.org/10.1109/54.329446
Publikováno v:
Journal of Microelectromechanical Systems. 1:52-59
Making submicron interelectrode gaps is the key to reducing the driving voltage of a micro comb-drive electrostatic actuator. Two new fabrication technologies, oxidation machining and a post-release positioning method, are proposed to realize submicr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e2fb31da4153e1c4002874d84f18b61a
https://doi.org/10.1109/84.128056
https://doi.org/10.1109/84.128056
Publikováno v:
Scopus-Elsevier
The results from a comparative study of Young's modulus, residual stress, and membrane burst pressure of undoped LPCVD polysilicon films exposed to various concentrations of hydrofluoric acid (HF) are presented. A reversal from compressive to tensile
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::44f208b0b4c7cbefe0739637c7aba104
https://doi.org/10.1007/bf02654536
https://doi.org/10.1007/bf02654536
Publikováno v:
TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
Surface micromachined actuators composed of polysilicon, parallelogram flexible supports are described. The parallelogram actuators transform both the direction and the magnitude of the attractive, electrostatic force developed between the drive elec
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e210dab0077470a7d6bdebfd94f222f5
https://doi.org/10.1109/sensor.1991.148800
https://doi.org/10.1109/sensor.1991.148800
Autor:
K.J. Gabriel, H. Fujita
Publikováno v:
TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
Microactuators fabricated by an IC-based micromachining technique are reviewed. The microactuators are driven by various forces suitable in the microdomain. The advantages and the limitations of fabrication processes suggest that microelectromechanic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c059e077f07bb97adc1a85caf31a7000
https://doi.org/10.1109/sensor.1991.148786
https://doi.org/10.1109/sensor.1991.148786
Publikováno v:
TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
Resonant and nonresonant operation of submicron gap, electrostatic, comb-drive actuators is reported. Using a single-mask process and a 4- mu m-thick phosphorus-doped polysilicon layer as the structural material, a resonant actuator and a nonresonant
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3d126b3ff4f9b71aceb0bd1b74d36a3f
https://doi.org/10.1109/sensor.1991.149025
https://doi.org/10.1109/sensor.1991.149025
Publikováno v:
[1991] Proceedings. IEEE Micro Electro Mechanical Systems.
The authors present a processing technique consisting of polysilicon etching, thermal oxidation of polysilicon, and silicon dioxide wet-etching which results in the fabrication of operational, submicron gaps between the electrodes of side-drive actua
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dd63b6fff3af70ed031f90cf5c2deaad
https://doi.org/10.1109/memsys.1991.114769
https://doi.org/10.1109/memsys.1991.114769