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Publikováno v:
Measurement Science and Technology. 18:1327-1337
We report on relative and absolute intensity calibrations of a modern broadband echelle spectrometer (type ESA 3000? trademark of LLA Instruments GmbH, Berlin) for use in the diagnostics of low-temperature plasma. This type of device measures simulta
Autor:
A.A. Ivanov, K. Wiesemann
Publikováno v:
IEEE Transactions on Plasma Science. 33:1743-1762
Publikováno v:
International Journal of Mass Spectrometry. :679-693
In plasma chemistry, commercially available systems of combined ion energy and mass analyzers are commonly used for plasma parameter control in processes like plasma supported film deposition or surface modifications. The usual way to measure ion dis
Publikováno v:
Journal of Physics D: Applied Physics. 34:1819-1826
In dielectric barrier discharges in helium-nitrogen mixtures of 1 bar the rotational temperature of the first negative system (transitions N+2(B→X)) depends on the nitrogen partial pressure pN2 and increases up to 600 K at high pN2 while that of th
Publikováno v:
Plasma Physics and Controlled Fusion. 41:721-732
Calculations based on a recently derived theory for the non-saturating ion current of a flush mounted Langmuir probe in an oblique magnetic field are compared with the measured ionic branches of probe characteristics obtained in an electron cyclotron
Publikováno v:
Journal of Physics D: Applied Physics. 31:2112-2116
A windowless Si(Li) detector was calibrated in the energy range 0.53-14 keV. We used the continuous bremsstrahlung spectra produced by an electron beam on a thick carbon target as a reference. The theoretical shape of the spectra was calculated with
Publikováno v:
Journal of Applied Physics. 82:2115-2122
In a balanced magnetron sputtering system the thermal power at a substrate has been determined from the temperature change of the substrate when the plasma is switched on. Using the temperature as a function of the potential of a probe, the calorimet
Autor:
K Wiesemann, I P Vinogradov
Publikováno v:
Plasma Sources Science and Technology. 6:307-316
By using emission and classical absorption spectroscopy with a continuum light source we have investigated dielectric barrier discharges in /NO and mixtures. The concentrations of NO, , , , and were measured inside the discharge and in the exhaust. I
Publikováno v:
Measurement Science and Technology. 8:773-781
For determining the efficiency of a vacuum-UV monochromator with a multiplier type PMT-142 in the range 110 - 450 nm two different methods for absolute and six methods for relative calibrations were used. The results of all relative calibrations exce