Zobrazeno 1 - 2
of 2
pro vyhledávání: '"K. V. Kodandarama"'
Autor:
A. Vais, S. Yadav, Y. Mols, B. Vermeersch, K. V. Kodandarama, M. Baryshnikova, G. Mannaert, R. Alcotte, G. Boccardi, P. Wambacq, B. Parvais, R. Langer, B. Kunert, N. Collaert
Publikováno v:
ESSDERC 2022 - IEEE 52nd European Solid-State Device Research Conference (ESSDERC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::62fcb65001f4b42edafbeff13af12861
https://doi.org/10.1109/essderc55479.2022.9947124
https://doi.org/10.1109/essderc55479.2022.9947124
Autor:
O. Syshchyk, Niamh Waldron, B. Hsu, E. Simoen, Nadine Collaert, Yves Mols, A. Vais, Bernardette Kunert, Hao Yu, K. V. Kodandarama, Alireza Alian
Publikováno v:
IRPS
We introduce a set of new characterization techniques for the direct defect analysis of the sidewall surfaces of Nano-ridge, Nanowire, and FinFET based devices, being used in current (and future) logic and RF technologies. We demonstrate the applicat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::78248aafec4bd7564ffffbd33d181c5c
https://doi.org/10.1109/irps46558.2021.9405095
https://doi.org/10.1109/irps46558.2021.9405095