Zobrazeno 1 - 1
of 1
pro vyhledávání: '"K. Toshiro DOI"'
Publikováno v:
Jin'gangshi yu moliao moju gongcheng, Vol 42, Iss 6, Pp 637-649 (2022)
Wide-band-gap semiconductors such as silicon carbide, gallium nitride, and diamond are known as hard-to-process materials. In this study, two types of chemical mechanical polishing (CMP)-related processing equipment were designed to create novel high
Externí odkaz:
https://doaj.org/article/527951fee8244ef9bfc9332f909ec3a4
