Zobrazeno 1 - 10
of 392
pro vyhledávání: '"K. Tamaru"'
Publikováno v:
Applied Physics B. 92:73-77
We describe a comparative study of the emission characteristics of debris from CO2 and Nd:YAG laser-produced tin plasmas for developing an extreme-ultraviolet (EUV) lithography light source. Tin (Sn) ions and droplets emitted from a Sn plasma produce
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f3c0afc6e1bb9e9e71a211772d3530d4
https://doi.org/10.1007/s00340-008-3068-5
https://doi.org/10.1007/s00340-008-3068-5
Publikováno v:
Applied Physics A. 92:767-772
The dynamics of debris from the laser-produced tin (Sn) plasma was investigated for an extreme ultraviolet light source in order to establish the guideline for the optimum design of a mitigation system, such as a mass-limited target. The disseminatio
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::14c816d2782a6d6f401e765084b7de77
https://doi.org/10.1007/s00339-008-4566-3
https://doi.org/10.1007/s00339-008-4566-3
Publikováno v:
The Review of Laser Engineering. 36:1129-1131
In the development of extreme ultraviolet (EUV) light source for EUV lithography systems by laser-produced plasma (LPP), mass-limited targets such as a micro-droplet were considered as promising targets for debris mitigation. In our study, the dynami
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ae5367a6702c2641918c91d962dc2a45
https://doi.org/10.2184/lsj.36.1129
https://doi.org/10.2184/lsj.36.1129
Publikováno v:
SPIE Proceedings.
The results of a comparative investigation on the emission characteristics of debris from CO 2 laser-produced tin plasma and Nd: YAG laser-produced tin plasma for an extreme ultraviolet lithography (EUV) light source. The tin ions and droplets emitte
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d6763a238bdfd6b36eca9a63e5b4c1ff
https://doi.org/10.1117/12.767894
https://doi.org/10.1117/12.767894
Autor:
Jerzy Haber, Jochen H. Block, P. C. Gravelle, N. Sheppard, M. W. Roberts, K. Tamaru, Alexander M. Bradshaw, R. S. Hansen
Publikováno v:
Pure and Applied Chemistry. 62:2297-2322
The major techniques presently used for characterising solid surfaces are summarized. These techniques include interactions (or release) of photons, electrons and neutral or charged atoms and molecules, and other miscellaneous methods which may be ap
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0d0531c3d2628fe08df963879d3ccc99
https://doi.org/10.1351/pac199062122297
https://doi.org/10.1351/pac199062122297
Publikováno v:
2007 Conference on Lasers and Electro-Optics - Pacific Rim.
Debris, generated form a laser-produced Sn plasma extreme-ultraviolet source for the next generation optical lithography, was investigated by the laser-induced fluorescence (LIF) imaging for Sn atoms and a Faraday cup for ionic species. The sputterin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d0a9df0769b018e13e9ff2a6cb158a87
https://doi.org/10.1109/cleopr.2007.4391455
https://doi.org/10.1109/cleopr.2007.4391455
Publikováno v:
SPIE Proceedings.
In the development of extreme ultraviolet (EUV) light source for EUV lithography systems by laser-produced plasma (LPP), reduction of debris emitted from the plasma such as ions, droplets and neutral atoms is one of the most important factors. In our
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::39bc9dc0129e5c4216edc1e348555997
https://doi.org/10.1117/12.698790
https://doi.org/10.1117/12.698790
Akademický článek
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Akademický článek
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Publikováno v:
COMPCON '77.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0c1b05225e70fd5b2eb9754e80384c8b
https://doi.org/10.1109/cmpcon.1977.680853
https://doi.org/10.1109/cmpcon.1977.680853