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Development of an all-in one wet single wafer process for 3D-SIC bump integration and its monitoring
Publikováno v:
2016 IEEE 18th Electronics Packaging Technology Conference (EPTC).
In this paper we will described an integrated wet process for bump fabrication. The integrated wet process is comprising of a photoresist strip, a copper (Cu) seed layer etch and a titanium-tungsten alloy (TiW) etch. In order to minimize the Cu later
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Autor:
Smith J; The Roslin Institute and Royal (Dick) School of Veterinary Studies, University of Edinburgh, Easter Bush Campus, Edinburgh, UK., Alfieri JM; Interdisciplinary Program in Ecology and Evolutionary Biology, Texas A&M University, College Station, Texas, USA.; Department of Biology, Texas A&M University, College Station, Texas, USA.; Department of Poultry Science, Texas A&M University, College Station, Texas, USA., Anthony N; Cobb-Vantress, Siloam Springs, Arkansas, USA., Arensburger P; Biological Sciences Department, California State Polytechnic University, Pomona, California, USA., Athrey GN; Interdisciplinary Program in Ecology and Evolutionary Biology, Texas A&M University, College Station, Texas, USA.; Department of Poultry Science, Texas A&M University, College Station, Texas, USA., Balacco J; The Rockefeller University, New York, New York, USA., Balic A; The Roslin Institute and Royal (Dick) School of Veterinary Studies, University of Edinburgh, Easter Bush Campus, Edinburgh, UK., Bardou P; Université de Toulouse, INRAE, ENVT, GenPhySE, Sigenae, Castanet Tolosan, France., Barela P; University of Arizona, Tucson, Arizona, USA., Bigot Y; PRC, UMR INRAE 0085, CNRS 7247, Centre INRAE Val de Loire, Nouzilly, France., Blackmon H; Interdisciplinary Program in Ecology and Evolutionary Biology, Texas A&M University, College Station, Texas, USA.; Department of Biology, Texas A&M University, College Station, Texas, USA., Borodin PM; Department of Molecular Genetics, Cell Biology and Bioinformatics, Institute of Cytology and Genetics of Siberian Branch of Russian Academy of Sciences, Novosibirsk, Russian Federation., Carroll R; Department of Animal Sciences, Data Science and Informatics Institute, University of Missouri, Columbia, Missouri, USA., Casono MC; University of Arizona, Tucson, Arizona, USA., Charles M; University Paris-Saclay, INRAE, AgroParisTech, GABI, Sigenae, Jouy-en-Josas, France., Cheng H; USDA, ARS, USNPRC, Avian Disease and Oncology Laboratory, East Lansing, Michigan, USA., Chiodi M; University of Arizona, Tucson, Arizona, USA., Cigan L; University of Arizona, Tucson, Arizona, USA., Coghill LM; Department of Veterinary Pathology, University of Missouri, Columbia, Missouri, USA., Crooijmans R; Animal Breeding and Genomics, Wageningen University and Research, Wageningen, The Netherlands., Das N; University of Arizona, Tucson, Arizona, USA., Davey S; University of Arizona, Tucson, Arizona, USA., Davidian A; Saint Petersburg State University, Saint Petersburg, Russian Federation., Degalez F; INRAE, INSTITUT AGRO, PEGASE UMR 1348, Saint-Gilles, France., Dekkers JM; Feed the Future Innovation Lab for Genomics to Improve Poultry, University of California, Davis, California, USA.; Department of Animal Science, Iowa State University, Ames, Iowa, USA., Derks M; Animal Breeding and Genomics, Wageningen University and Research, Wageningen, The Netherlands., Diack AB; The Roslin Institute and Royal (Dick) School of Veterinary Studies, University of Edinburgh, Easter Bush Campus, Edinburgh, UK., Djikeng A; Centre for Tropical Livestock Genetics and Health (CTLGH) - The Roslin Institute, Edinburgh, UK., Drechsler Y; College of Veterinary Medicine, Western University of Health Sciences, Pomona, California, USA., Dyomin A; Saint Petersburg State University, Saint Petersburg, Russian Federation., Fedrigo O; The Rockefeller University, New York, New York, USA., Fiddaman SR; Department of Zoology, University of Oxford, Oxford, UK., Formenti G; The Rockefeller University, New York, New York, USA., Frantz LAF; Queen Mary University of London, Bethnal Green, London, UK.; Palaeogenomics Group, Department of Veterinary Sciences, LMU Munich, Munich, Germany., Fulton JE; Hy-Line International, Research and Development, Dallas Center, Iowa, USA., Gaginskaya E; Saint Petersburg State University, Saint Petersburg, Russian Federation., Galkina S; Saint Petersburg State University, Saint Petersburg, Russian Federation., Gallardo RA; Feed the Future Innovation Lab for Genomics to Improve Poultry, University of California, Davis, California, USA.; School of Veterinary Medicine, University of California, Davis, California, USA., Geibel J; Institute of Farm Animal Genetics, Friedrich-Loeffler-Institut, Neustadt, Germany.; Center for Integrated Breeding Research, University of Göttingen, Göttingen, Germany., Gheyas AA; The Roslin Institute and Royal (Dick) School of Veterinary Studies, University of Edinburgh, Easter Bush Campus, Edinburgh, UK., Godinez CJP; Department of Animal Science, College of Agriculture and Food Science, Visayas State University, Baybay City, Philippines., Goodell A; University of Arizona, Tucson, Arizona, USA., Graves JAM; Department of Environment and Genetics, La Trobe University, Melbourne, Victoria, Australia.; Institute for Applied Ecology, University of Canberra, Canberra, Australian Capital Territory, Australia., Griffin DK; School of Biosciences, University of Kent, Canterbury, UK., Haase B; The Rockefeller University, New York, New York, USA., Han JL; CAAS-ILRI Joint Laboratory on Livestock and Forage Genetic Resources, Institute of Animal Science, Chinese Academy of Agricultural Sciences (CAAS), Beijing, China.; International Livestock Research Institute (ILRI), Addis Ababa, Ethiopia., Hanotte O; International Livestock Research Institute (ILRI), Addis Ababa, Ethiopia.; Cells, Organisms and Molecular Genetics, School of Life Sciences, University of Nottingham, Nottingham, UK.; Centre for Tropical Livestock Genetics and Health, The Roslin Institute, Edinburgh, UK., Henderson LJ; The Roslin Institute and Royal (Dick) School of Veterinary Studies, University of Edinburgh, Easter Bush Campus, Edinburgh, UK., Hou ZC; National Engineering Laboratory for Animal Breeding and Key Laboratory of Animal Genetics, Breeding and Reproduction, MARA, College of Animal Science and Technology, China Agricultural University, Beijing, China., Howe K; Wellcome Trust Sanger Institute, Hinxton, UK., Huynh L; Institute for Immunology and Infection Research, University of Edinburgh, Edinburgh, UK., Ilatsia E; Dairy Research Institute, Kenya Agricultural and Livestock Organization, Naivasha, Kenya., Jarvis ED; The Rockefeller University, New York, New York, USA., Johnson SM; University of Arizona, Tucson, Arizona, USA., Kaufman J; Institute for Immunology and Infection Research, University of Edinburgh, Edinburgh, UK.; Department of Veterinary Medicine, University of Cambridge, Cambridge, UK.; Department of Pathology, University of Cambridge, Cambridge, UK., Kelly T; Feed the Future Innovation Lab for Genomics to Improve Poultry, University of California, Davis, California, USA.; School of Veterinary Medicine, University of California, Davis, California, USA., Kemp S; Centre for Tropical Livestock Genetics and Health (CTLGH) - ILRI, Nairobi, Kenya., Kern C; Department of Animal Science, University of California, Davis, California, USA., Keroack JH; University of Arizona, Tucson, Arizona, USA., Klopp C; INRAE, MIAT UR875, Sigenae, Castanet Tolosan, France., Lagarrigue S; INRAE, INSTITUT AGRO, PEGASE UMR 1348, Saint-Gilles, France., Lamont SJ; Feed the Future Innovation Lab for Genomics to Improve Poultry, University of California, Davis, California, USA.; Department of Animal Science, Iowa State University, Ames, Iowa, USA., Lange M; Department of Molecular Microbiology and Immunology, University of Missouri, Columbia, Missouri, USA., Lanke A; BASIS Chandler High School, Chandler, Arizona, USA., Larkin DM; Department of Comparative Biomedical Sciences, Royal Veterinary College, University of London, London, UK., Larson G; The Palaeogenomics and Bio-Archaeology Research Network, Research Laboratory for Archaeology and History of Art, The University of Oxford, Oxford, UK., Layos JKN; College of Agriculture and Forestry, Capiz State University, Mambusao, Philippines., Lebrasseur O; Centre d'Anthropobiologie et de Génomique de Toulouse (CAGT), CNRS UMR 5288, Université Toulouse III Paul Sabatier, Toulouse, France.; Instituto Nacional de Antropología y Pensamiento Latinoamericano, Ciudad Autónoma de Buenos Aires, Argentina., Malinovskaya LP; Department of Cytology and Genetics, Novosibirsk State University, Novosibirsk, Russian Federation., Martin RJ; Department of Pathology, University of Cambridge, Cambridge, UK., Martin Cerezo ML; AVIAN Behavioural Genomics and Physiology, IFM Biology, Linköping University, Linköping, Sweden., Mason AS; Department of Biology, The University of York, York, UK., McCarthy FM; University of Arizona, Tucson, Arizona, USA., McGrew MJ; The Roslin Institute and Royal (Dick) School of Veterinary Studies, University of Edinburgh, Easter Bush Campus, Edinburgh, UK.; Centre for Tropical Livestock Genetics and Health (CTLGH) - The Roslin Institute, Edinburgh, UK., Mountcastle J; The Rockefeller University, New York, New York, USA., Muhonja CK; Dairy Research Institute, Kenya Agricultural and Livestock Organization, Naivasha, Kenya.; Centre for Tropical Livestock Genetics and Health (CTLGH) - ILRI, Nairobi, Kenya., Muir W; Department of Animal Sciences, Purdue University, West Lafayette, Indiana, USA., Muret K; Université Paris-Saclay, Commissariat à l'Energie Atomique et aux Energies Alternatives, Centre National de Recherche en Génomique Humaine, Evry, France., Murphy TD; National Center for Biotechnology Information, National Library of Medicine, National Institutes of Health, Bethesda, Maryland, USA., Ng'ang'a I; Queen Mary University of London, Bethnal Green, London, UK., Nishibori M; Laboratory of Animal Genetics, Graduate School of Integrated Sciences for Life, Hiroshima University, Higashi-Hiroshima, Japan., O'Connor RE; School of Biosciences, University of Kent, Canterbury, UK., Ogugo M; Centre for Tropical Livestock Genetics and Health (CTLGH) - ILRI, Nairobi, Kenya., Okimoto R; Cobb-Vantress, Siloam Springs, Arkansas, USA., Ouko O; Dairy Research Institute, Kenya Agricultural and Livestock Organization, Naivasha, Kenya., Patel HR; The John Curtin School of Medical Research, Australian National University, Canberra, Australian Capital Territory, Australia., Perini F; The Roslin Institute and Royal (Dick) School of Veterinary Studies, University of Edinburgh, Easter Bush Campus, Edinburgh, UK.; Department of Agricultural, Food and Environmental Sciences, University of Perugia, Perugia, Italy., Pigozzi MI; INBIOMED (CONICET-UBA), Facultad de Medicina, Universidad de Buenos Aires, Buenos Aires, Argentina., Potter KC; University of Arizona, Tucson, Arizona, USA., Price PD; Ecology and Evolutionary Biology, School of Biosciences, University of Sheffield, Sheffield, UK., Reimer C; Institute of Farm Animal Genetics, Friedrich-Loeffler-Institut, Neustadt, Germany., Rice ES; Department of Animal Sciences, Bond Life Sciences Center, University of Missouri, Columbia, Missouri, USA., Rocos N; Institute for Immunology and Infection Research, University of Edinburgh, Edinburgh, UK., Rogers TF; Department of Molecular Evolution and Development, University of Vienna, Vienna, Austria., Saelao P; Feed the Future Innovation Lab for Genomics to Improve Poultry, University of California, Davis, California, USA.; Department of Animal Science, University of California, Davis, California, USA.; Veterinary Pest Genetics Research Unit, USDA, Kerrville, Texas, USA., Schauer J; Institute of Farm Animal Genetics, Friedrich-Loeffler-Institut, Neustadt, Germany., Schnabel RD; Department of Animal Sciences, University of Missouri, Columbia, Missouri, USA., Schneider VA; National Center for Biotechnology Information, National Library of Medicine, National Institutes of Health, Bethesda, Maryland, USA., Simianer H; Center for Integrated Breeding Research, University of Göttingen, Göttingen, Germany., Smith A; Department of Zoology, University of Oxford, Oxford, UK., Stevens MP; The Roslin Institute and Royal (Dick) School of Veterinary Studies, University of Edinburgh, Easter Bush Campus, Edinburgh, UK., Stiers K; Department of Veterinary Pathology, University of Missouri, Columbia, Missouri, USA., Tiambo CK; Centre for Tropical Livestock Genetics and Health (CTLGH) - ILRI, Nairobi, Kenya., Tixier-Boichard M; University Paris-Saclay, INRAE, AgroParisTech, GABI, Sigenae, Jouy-en-Josas, France., Torgasheva AA; Department of Molecular Genetics, Cell Biology and Bioinformatics, Institute of Cytology and Genetics of Siberian Branch of Russian Academy of Sciences, Novosibirsk, Russian Federation., Tracey A; Wellcome Trust Sanger Institute, Hinxton, UK., Tregaskes CA; Department of Veterinary Medicine, University of Cambridge, Cambridge, UK.; Department of Pathology, University of Cambridge, Cambridge, UK., Vervelde L; The Roslin Institute and Royal (Dick) School of Veterinary Studies, University of Edinburgh, Easter Bush Campus, Edinburgh, UK., Wang Y; Feed the Future Innovation Lab for Genomics to Improve Poultry, University of California, Davis, California, USA.; Department of Animal Science, University of California, Davis, California, USA., Warren WC; Department of Animal Sciences, Bond Life Sciences Center, University of Missouri, Columbia, Missouri, USA.; Department of Animal Sciences, University of Missouri, Columbia, Missouri, USA., Waters PD; School of Biotechnology and Biomolecular Science, Faculty of Science, UNSW Sydney, Sydney, New South Wales, Australia., Webb D; National Center for Biotechnology Information, National Library of Medicine, National Institutes of Health, Bethesda, Maryland, USA., Weigend S; Institute of Farm Animal Genetics, Friedrich-Loeffler-Institut, Neustadt, Germany.; Center for Integrated Breeding Research, University of Göttingen, Göttingen, Germany., Wolc A; Department of Animal Science, Iowa State University, Ames, Iowa, USA.; Hy-Line International, Research and Development, Dallas Center, Iowa, USA., Wright AE; Ecology and Evolutionary Biology, School of Biosciences, University of Sheffield, Sheffield, UK., Wright D; AVIAN Behavioural Genomics and Physiology, IFM Biology, Linköping University, Linköping, Sweden., Wu Z; The Roslin Institute and Royal (Dick) School of Veterinary Studies, University of Edinburgh, Easter Bush Campus, Edinburgh, UK., Yamagata M; Center for Brain Science, Department of Molecular and Cellular Biology, Harvard University, Cambridge, Massachusetts, USA., Yang C; BGI-Shenzhen, Shenzhen, China., Yin ZT; National Engineering Laboratory for Animal Breeding and Key Laboratory of Animal Genetics, Breeding and Reproduction, MARA, College of Animal Science and Technology, China Agricultural University, Beijing, China., Young MC; University of Arizona, Tucson, Arizona, USA., Zhang G; Center for Evolutionary and Organismal Biology, Zhejiang University School of Medicine, Hangzhou, China., Zhao B; College of Animal Science and Technology, Nanjing Agricultural University, Nanjing, China., Zhou H; Feed the Future Innovation Lab for Genomics to Improve Poultry, University of California, Davis, California, USA.; Department of Animal Science, University of California, Davis, California, USA.
Publikováno v:
Cytogenetic and genome research [Cytogenet Genome Res] 2022; Vol. 162 (8-9), pp. 405-528. Date of Electronic Publication: 2023 Jan 30.