Zobrazeno 1 - 6
of 6
pro vyhledávání: '"K. Sareło"'
Autor:
M. Olszacki, Isabella Augustyniak, Émilie Debourg, P. Knapkiewicz, Patrick Pons, K. Sareło, Jan Dziuban
Publikováno v:
Sensors and Actuators A: Physical
Sensors and Actuators A: Physical, 2015, 232, pp. 353-358. ⟨10.1016/j.sna.2015.05.006⟩
Sensors and Actuators A: Physical, Elsevier, 2015, 232, pp. 353-358. ⟨10.1016/j.sna.2015.05.006⟩
Sensors and Actuators A: Physical, 2015, 232, pp. 353-358. ⟨10.1016/j.sna.2015.05.006⟩
Sensors and Actuators A: Physical, Elsevier, 2015, 232, pp. 353-358. ⟨10.1016/j.sna.2015.05.006⟩
International audience; The silicon-glass MEMS high dose radiation sensor with the optical read-out, acting above 10 kGy has been presented. The sensor consists of a microchamber filled with small portion of high density polyethy-lene (HDPE) and thin
Micromechanical High-doses Radiation Sensor with Bossed Membrane and Interferometry Optical Read-out
Autor:
Émilie Debourg, K. Sareło, I. Augustyniak, P. Knapkiewicz, Patrick Pons, Jan Dziuban, M. Olszacki
Publikováno v:
Proceedings Eurosensors
Eurosensors XXVIII
Eurosensors XXVIII, Sep 2014, Brescia, Italy. pp.Proceedings Eurosensors
Eurosensors XXVIII
Eurosensors XXVIII, Sep 2014, Brescia, Italy. pp.Proceedings Eurosensors
International audience; The silicon-glass MEMS high-doses radiation sensor with in situ detection, so far not possible in the field of detection of doses above 10 kGy, has been presented. The sensor consists of a chamber filled with the high density
Publikováno v:
The Experience of Designing and Application of CAD Systems in Microelectronics.
A new optical MEMS silicon pressure sensor for use in high temperature (up to 450°C) and high radiation environments has been developed. Preliminary tests of the pressure sensor integrated with the components of the optical detection system and soft
Publikováno v:
Measurement Science and Technology. 28:054009
Publikováno v:
Journal of Micromechanics and Microengineering. 25:074009
In this paper a special optical detection system designed for a MEMS-type (micro-electro-mechanical system) silicon pressure sensor is presented. The main part of the optical system—a detection unit with a perforated membrane—is bonded to the sil
Publikováno v:
Journal of Micromechanics & Microengineering; Jul2015, Vol. 25 Issue 7, p1-1, 1p