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Autor:
Yong Liang, S. Thevuthasan, K. S. Rounds, T. R. Howard, D. R. Baer, M. H. Englehard, J. R. Munn, J. N. Worthington
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 13:1900
A multiinstrument, multitask UHV sample transfer system being developed for integration with a wide range of synthesis and analysis instruments is described. The specimen transfer capability allows a sample to be synthesized, processed, and character
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::484383065cc94a88a4fe58275bd4831d
https://doi.org/10.1116/1.587832
https://doi.org/10.1116/1.587832
