Zobrazeno 1 - 10
of 256
pro vyhledávání: '"K. Nummy"'
Deep Subwavelength Anti-Slot Photonic Crystals Fabricated in Monolithic Silicon Photonics Technology
Autor:
J. A. Allen, K. P. Arnold, S. I. Halimi, L. D. Ryder, F. O. Afzal, Y. Bian, A. Aboketaf, K. Dezfulian, M. Rakowski, R. Augur, T. Hirokawa, K. Nummy, Sharon M. Weiss
Publikováno v:
IEEE Photonics Technology Letters. 35:461-464
Publikováno v:
Microscopy Today. 29:36-44
2-D junction characterization by dual lens electron holography, scanning capacitance microscopy (SCM), and scanning spreading resistance microscopy (SSRM) on a variety of semiconductor devices is reported, including optical modulators, regular comple
Publikováno v:
Microscopy and Microanalysis. 24:1464-1465
Akademický článek
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Akademický článek
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Autor:
Moghith, Walid M. A.1 walidmoghith@drc.gov.eg
Publikováno v:
Alexandria Science Exchange Journal. Jul-Sep2024, Vol. 45 Issue 3, p409-419. 11p.
Autor:
K. Nummy, V. J. Silvestri, R. Bendernagel, J. Hann, V. T. Phan, D. Kerr, J. O. Borland, P. Ronsheim
Publikováno v:
Journal of The Electrochemical Society. 137:2323-2327
ULSI quality silicon epitaxial films as thin as 0.6 μm have been grown using dichlorosilane at temperatures as low as 850 o C and pressures as low as 10 torr in commercially available cylindrical epi reactors. Removal of the substrate surface native
Autor:
Andrew Waite, B. Yang, C. D. Sheraw, H. Yin, M. Yang, S. D. Kim, X. Chen, D. Fried, B. Kim, L. Black, Scott Luning, P. Agnello, K. Nummy, M. Khare, S. Narasimha
Publikováno v:
2007 International Workshop on Electron Devices and Semiconductor Technology (EDST).
Hybrid-orientation technology (HOT), a novel planar CMOS approach that fabricates NMOS on (100) silicon surface and PMOS on (110) silicon surface to take advantage of the highest carrier mobilities on these surfaces, is reviewed. HOT module process f
Autor:
D. Schepis, C.Y. Sung, H. Yin, B. Kim, B. Yang, M. Khare, L. Black, C. D. Sheraw, Donggun Park, H.V. Meer, X. Chen, J. Johnson, Andrew Waite, K. Nummy, H. Gossmann, P. Agnello, Philip A. Fisher, Scott Luning, S. Narasimha, D. Chidambarrao, Judson R. Holt, S. D. Kim, D. Wehella-gamage, Y. Liu
Publikováno v:
2007 IEEE Symposium on VLSI Technology.
This work demonstrates that the ~2times mobility advantage of (110) PMOS over (100) PMOS is maintained down to 190 nm liners poly-pitch for devices under compressive stress. (110) PMOS with 3.5 GPa compressively stressed liners demonstrate strong cha
Autor:
Byeong Y. Kim, Richard A. Wachnik, Hasan M. Nayfeh, Henry K. Utomo, Mukesh Khare, Jian Yu, Jinping Liu, Anthony G. Domenicucci, Haizhou Yin, Shreesh Narasimha, B. Yang, Dureseti Chidambarrao, R. Pal, Keith H. Tabakman, Seong-Dong Kim, Dominic J. Schepis, Z. Luo, Effendi Leobandung, Brian J. Greene, S.H. Ku, Paul D. Agnello, X. Wang, Q. Liang, Andrew Waite, L. Black, Scott Luning, Chun-Yung Sung, Gregory G. Freeman, Y. Wang, K. Nummy, H.V. Meer, Philip A. Fisher, Edward P. Maciejewski, X. Chen, D.-G. Park, Judson R. Holt
Publikováno v:
2007 IEEE International Electron Devices Meeting.
This paper presents for the first time (110) PMOS characteristics without Rext degradation, allowing investigation of fundamental mobility and demonstration of drive current Ion in excess of 1mA/mum at Ioff =100 nA/μm.