Zobrazeno 1 - 10
of 25
pro vyhledávání: '"K. K. M. B. D. Silva"'
Autor:
Venkatesh Chenniappan, Gilberto A. Umana-Membreno, Lorenzo Faraone, Mariusz Martyniuk, K. K. M. B. D. Silva, Adrian Keating, John Dell
Publikováno v:
2018 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD).
This paper presents a simple method to extract the damping ratio of bilayer cantilevers using the static deflection profile of the released cantilevers. The extracted damping ratio is used to build a second order dynamical model of the cantilever. Th
Autor:
Mariusz Martyniuk, K. K. M. B. D. Silva, Adrian Keating, Praveen K. Revuri, Lorenzo Faraone, Dhirendra Kumar Tripathi, Gino Putrino
Publikováno v:
2018 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD).
This paper presents Low temperature (50°C) high deposition rate (1.3nm/sec) inductively coupled plasma chemical vapor deposited silicon and silicon oxide films with uniform thicknesses over large area. It is observed deposition rate of Si thin is in
Autor:
Mariusz Martyniuk, Kirsten L. Brookshire, R. Rafiei, K. K. M. B. D. Silva, Lorenzo Faraone, Yong Liu
Publikováno v:
Journal of Microelectromechanical Systems. 25:549-556
This paper presents a study of the effects of stress and thermal expansion of inductively coupled plasma enhanced chemical vapor deposited (ICPCVD) amorphous Si thin films on low-temperature microelectromechanical systems test structures. Experimenta
Autor:
Robert C. Woodward, D.A. Baldwin, John Cliff, K. K. M. B. D. Silva, Roger Jeffery, John Dell, R.N. Krishnan, Mariusz Martyniuk, Lorenzo Faraone
Publikováno v:
University of Western Australia
We report on the preparation and characterization of crystalline bismuth oxide thin films via Biased Target Ion Beam Deposition method. A focused blue laser (405nm) is used to write an array of dots in the bismuth oxide thin film and demonstrate clea
Autor:
K. K. M. B. D. Silva, Venkatesh Chenniappan, Lorenzo Faraone, Gilberto A. Umana-Membreno, Adrian Keating, John Dell, Mariusz Martyniuk
Publikováno v:
Journal of Applied Physics. 125:125106
This work presents a study of photostriction-based optical actuation in bilayer cantilevers made of silicon and germanium thin-films and follows previous work in this area on silicon cantilevers. This experimental and theoretical study examines the r
Publikováno v:
Procedia Engineering. 47:406-409
The concept and realisation of infrared micro-spectrometers using MEMS based Fabry-Perot micro-filters integrated with IR photo-detectors are presented. By using five layer mirror structures, and stress optimisation in mirrors and actuators the tunin
Autor:
K. K. M. B. D. Silva, Adrian Keating, Jeffrey D. Beck, Pradip Mitra, C.A. Musca, Jaroslaw Antoszewski, K.J. Winchester, T. Nguyen, J. E. Robinson, M. R. Skokan, John Dell, Lorenzo Faraone
Publikováno v:
Journal of Electronic Materials. 37:1811-1820
Microspectrometers based on the monolithic integration of a microelectromechanical system (MEMS) Fabry–Perot filter and a HgxCd1–xTe-based infrared detector are discussed and measured results presented. The microspectrometers are designed to oper
Autor:
Jeffrey D. Beck, T. Nguyen, Adrian Keating, J. E. Robinson, K. K. M. B. D. Silva, K.J. Winchester, Lorenzo Faraone, John Dell, Pradip Mitra, M. R. Skokan, Jaroslaw Antoszewski, C.A. Musca
Publikováno v:
Scopus-Elsevier
A monolithically integrated low-temperature micro-electro-mechanical systems (MEMS) and HgCdTe infrared (IR) detector technology is introduced, implemented, and characterized. The ultimate aim of this project is to develop a MEMS-based optical filter
Autor:
L. Faraone, J. Antoszewski, K. K. M. B. D. Silva, John Bumgarner, Haifeng Mao, Mariusz Martyniuk
Publikováno v:
Proceedings of the 2014 International Conference on Quantitative InfraRed Thermography.
Many thermal imaging applications stand to gain from the inclusion of multispectral capabilities in the long wave infrared (LWIR). While infrared spectral imaging systems presently exist, the addition of multispectral capabilities will provide a numb
Autor:
John Bumgarner, Lorenzo Faraone, K. K. M. B. D. Silva, R. Rafiei, Jaroslaw Antoszewski, Mariusz Martyniuk, Dhirendra Kumar Tripathi, John Dell, T. Nguyen
Publikováno v:
2013 IEEE 8th International Conference on Industrial and Information Systems.
While optical spectral analysis has shown great promise in industrial and agricultural applications, the cost, size, and fragility of spectrometer instruments have hindered widespread application of the technology. MEMS microspectrometers offer great