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Autor:
Teunis J. Vink, Marcel A. J. Somers, J.L.C. Daams, K. J. A. van den Aker, A. G. Dirks, W. Walrave
Publikováno v:
Journal of Applied Physics. 74:988-995
Tungsten thin films were deposited on glass substrates by direct‐current planar magnetron sputtering. The induced thickness‐averaged film stress within the plane of the film was determined with the bending‐beam technique and changed from compre
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d4832c0d252649a3ef3e576a108deea1
https://doi.org/10.1063/1.354842
https://doi.org/10.1063/1.354842
