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Publikováno v:
i-manager's Journal on Material Science. 8:38
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::86588a4225a69244b15d638eaf7b87c4
https://doi.org/10.26634/jms.8.4.17932
https://doi.org/10.26634/jms.8.4.17932
Publikováno v:
i-Manager's Journal on Material Science; Jan-Mar2021, Vol. 8 Issue 4, p38-48, 11p
Cryosorption pumps are considered safe, quiet, and ultra-high vacuum production pumps which have their application from Semiconductor industries to ITER [International Thermonuclear Experimental Reactor] units. The principle of physisorption of gases
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b1d6b110a2388f983a0203326b4aee9f
