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Autor:
B. V. Goncharov, K. E. Prihod’ko, D. A. Komarov, Z. V. Lavrukhina, M. A. Tarkhov, M. M. Dement’eva, L. V. Kutuzov, E. D. Ol’shanskii, Evgenia Kuleshova, A. G. Domantovskii, B. A. Gurovich, D. A. Goncharova, V. L. Stolyarov
Publikováno v:
Nanotechnologies in Russia. 10:530-536
It is shown experimentally that the use of ion irradiation allows one to convert superconducting thin-film niobium nitride into dielectric niobium oxide in a controllable manner. The conversion of NbN into Nb2O5 throughout the entire thickness of the