Výsledky vyhledávání

Realization of Thin Film Specimens for Micro Tensile Tests

Autor: C. Malhaire, C. Josserond, L. Debove, S. Brida, M. Ignat, K. Dogheche

Publikováno v: TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and Microsystems Conference
TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2007, Lyon, France

This paper is focused on specimen's design and fabrication for micro tensile tests. The experimental approach is based on a new micro tensile testing system and the development of silicon frames sustaining submicron thick self-standing films. The bea

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7cbbdba74a011db2d478fc1a2a96b4c2
https://hal.archives-ouvertes.fr/hal-02049375

Zobrazit plný text záznamu

Static and dynamic measurements of active MEMS by Twyman-Green interferometry: case of AlN-based microactuators

Autor: Katarzyna Krupa, S. Balandras, K. Dogheche, Laurent Hirsinger, Alexandru Andrei, Michal Jozwik, Christophe Gorecki, Patrick Delobelle

Publikováno v: Proc. of SPIE
Interferometry XIII: Applications
Interferometry XIII: Applications, Aug 2006, San Diego, United States. pp.000
Proc. of SPIE, Optics and Photonics
2006, San Diego, United States

This study presents static and dynamic characterisation by Twyman Green interferometry of two active MEMS actuators driven by a thin film transducer of aluminium nitride (AlN). Firstly, we report on the testing results of thin film AlN/Si piezoelectr

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7b01313bd9c2246c69e9168219e9139c
https://hal.archives-ouvertes.fr/hal-00281835

Zobrazit plný text záznamu

A Bi-stable Micro-machined Piezoelectric Transducer for Mechanical to Electrical Energy Transformation

Autor: Benoit Charlot, Skandar Basrour, Laurent Hirsinger, Patrick Delobelle, Sylvain Ballandras, Eric Cattan, M. Marzencki, K. Dogheche, Bruno Cavallier, Denis Remiens

Publikováno v: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP'05), June 1-3
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP'05), June 1-3, 2005, Montreux, Switzerland. pp.303-304
HAL
Integrated Ferroelectrics
Integrated Ferroelectrics, Taylor & Francis, 2006, 80, pp.305-315
17th International Symposium on Integrated Ferroelectrics (ISIF 2005), Shanghai, China, april 17-20
17th International Symposium on Integrated Ferroelectrics (ISIF 2005), Shanghai, China, april 17-20, 2005, China
Integrated Ferroelectrics, Taylor & Francis, 2006, 80, pp.305-315. ⟨10.1080/10584580600659878⟩
Integrated Ferroelectrics, 2006, 80, pp.305-315. ⟨10.1080/10584580600659878⟩
DTIP of MEMS 3
DTIP of MEMS 3, 2005

ISBN: 28481303571; This paper presents a scavenging energy application of piezoelectric micro-machined ultrasonic transducers (pMUT). The micro power generator is composed by a silicon membrane (600µm diameter and 1µm thickness) with a 2µm thick P

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b5e1eaf3ba1bff3ad9f8f9ef2c86eb74
https://hal.archives-ouvertes.fr/hal-00009224

Zobrazit plný text záznamu

Piezoelectric micro-machined ultrasonic transducer (pMUT) for energy harvesting

Autor: B. Cavallier, Eric Cattan, Patrick Delobelle, Skandar Basrour, Benoit Charlot, K. Dogheche, M. Marzencki, Laurent Hirsinger, Sylvain Ballandras, Denis Remiens

Publikováno v: Ultrasonics Symposium, 18-21 Sept. Rotterdam Pays-Bas
Ultrasonics Symposium, 18-21 Sept. Rotterdam Pays-Bas, 2005, Netherlands
HAL
Proceedings of the 2005 IEEE International Ultrasonics Symposium
Ultrasonics Symposium, 18-21 Sept.
Ultrasonics Symposium, 18-21 Sept., Sep 2005, Rotterdam, Netherlands. pp.939-942, ⟨10.1109/ULTSYM.2005.1603005⟩
Ultrasonics Symposium, 18-21 Sept., 2005, Rotterdam, Netherlands. pp.939-942

ISSN: 1051-0117; Micro-electromechanical devices dedicated to energy scavenging purpose have yield an increasing interest for a few years. In this paper we report on the fabrication of PZT/Si piezoelectric micro-machined ultrasonic transducers (pMUT)

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::42cc7ba533d1bcf79fab66357484828b
https://hal.archives-ouvertes.fr/hal-00135673

Zobrazit plný text záznamu

Vyhledávací nástroje:

Upřesnit hledání