Zobrazeno 1 - 6
of 6
pro vyhledávání: '"K. B. Kadyrakunov"'
Publikováno v:
Physica Status Solidi (a). 75:483-488
The behaviour of phosphorus implanted films of polycrystalline silicon deposited on SiO2 is studied during the annealing with pulses of a xenon lamp of 10−2 s duration. It is shown that the annealing with flash lamp pulses allows a complete activat
Publikováno v:
Physica Status Solidi (a). 76:K213-K215
Publikováno v:
physica status solidi (a). 70:K15-K17
Publikováno v:
Physica Status Solidi (a). 75:K107-K109