Zobrazeno 1 - 1
of 1
pro vyhledávání: '"K. A. Atlasov"'
High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate
Autor:
Ulagalandha Perumal Dharanipathy, Nicolas Grandjean, Raphaël Butté, Romuald Houdré, J.-F. Carlin, N. Vico Triviño, A. Castiglia, Jacques Levrat, K. A. Atlasov, Georg Rossbach
Publikováno v:
APPLIED PHYSICS LETTERS
We report on the achievement of freestanding GaN photonic crystal L7 nanocavities with embedded InGaN/GaN quantum wells grown by metal organic vapor phase epitaxy on Si (111). GaN was patterned by e-beam lithography, using a SiO2 layer as a hard mask
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9a45742db803ceb7f1b7264b2ecfc227
