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pro vyhledávání: '"K K. Schuegraf"'
Publikováno v:
IEEE Transactions on Nuclear Science. 22:2605-2610
Integrated Injection Logic (I2 L) is a new highdensity, low power bipolar LSI technology that offers major performance advantages over other bipolar and MOS/LSI technologies. Results are presented on the experimentally-determined radiation sus ceptib
Autor:
R C. Rossi, K K. Schuegraf
Publikováno v:
SPIE Proceedings.
A photochemical process is described that has potential for the manufacture of very large scale integrated circuits. A prototype reactor is described and the results of experimentation are presented and discussed. The deposition of a Si02 thin film b