Abstracts of original contributions ASNC 2004 9th annual scientific session September 3-–October 3, 2004 New York, New York

Autor: A Abidov, R Hachamovitch, JD Friedman, SW Hayes, X Kang, I Cohen, G Germano, DS Berman, A Kjaer, A Cortsen, M Federspiel, B Hesse, S Holm, M O’Connor, AK Dhalla, M-Y Wong, W-Q Wang, L Belardinelli, CV Therapeutics, A Epps, S Dave, K Brewer, S Chiaramida, L Gordon, GH Hendrix, B Feng, PH Pretorius, PP Bruyant, G Boening, RD Beach, HC Gifford, MA King, JA Fessler, B-L Hsu, JA Case, LL Gegen, GK Hertenstein, SJ Cullom, TM Bateman, C Akincioglu, H Nishina, P Kavanagh, F Aboul-Enein, L Yang, S Hayes, J Friedman, D Berman, CA Santana, A Rivero, RD Folks, GB Grossman, CD Cooke, A Hunsche, TL Faber, R Halkar, EV Garcia, CL Hansen, S Silver, A Kaplan, R Rasalingam, M Awar, S Shirato, K Reist, T Htay, D Mehta, J-H Cho, J Heo, E Dubovsky, DA Calnon, KS Grewal, PB George, DR Richards, DH Hsi, N Singh, Z Meszaros, JL Thomas, E Reyes, CY Loong, K Latus, C Anagnostopoulos, SR Underwood, EJ Kostacos, LI Araujo, HC Lewin, MC Hyun, EG DePuey, H Tanaka, T Chikamori, Y Igarashi, K Harafuji, Y Usui, H Yanagisawa, S Hida, A Yamashina, HA Nasr, SA Mahmoud, MM Dalipaj, LN Golanowski, RA de Kemp, BJ Chow, RS Beanlands, TD Ruddy, HI Michelena, BM Mikolich, P McNelis, WA Van Decker, I Stathopoulos, S- A Duncan, C Isasi, MI Travin, JN Kritzman, EP Ficaro, JR Corbett, JS Allison, JW Weinsaft, FJ Wong, M Szulc, PM Okin, P Kligfield, S Ishimaru, A Yamashima, KN Giedd, SR Bergmann, S Shah, L Emmett, KC Allman, M Magee, W Van Gaal, L Kritharides, B Freedman, J Gerlach, R Miranda, N Damera, B Lone, R Singh, A Shah, S Yeturi, Y Prasad, S Blum, EN Heller, NC Bhalodkar, M Koutelou, N Kollaros, A Theodorakos, A Manginas, E Leontiadis, A Kouzoumi, D Cokkinos, M Mazzanti, M Marini, G Cianci, GP Perna, M Pai, MD Greenberg, F Liu, O Frankenberger, P Kokkinos, D Hanumara, E Goheen, C Wu, D Panagiotakos, R Fletcher, OJ Rodriguez, VN Iyer, M Lue, KT Hickey, DK Blood, S Bokhari, P Chareonthaitawee, SD Christensen, JL Allen, BJ Kemp, DO Hodge, EL Ritman, RJ Gibbons, P Smanio, G Riva, F Rodriquez, A Tricoti, A Nakhlawi, A Thom, S Dahlberg, J Leppo, PJ Slomka, R Petrovici, M Husain, DS Lee, K Nanthakumar, RM Iwanochko, RC Brunken, F DiFilippo, DR Neumann, B Bybel, B Herrington, T Bruckbauer, C Howe, K Lohmann, C Hayden, C Chatterjee, B Lathrop, MS Chen, KA Lohmann, WC Howe, T Kaczur, FP DiFilippo, RS Druz, OA Akinboboye, R Grimson, KJ Nichols, N Reichek, K Ngai, R Dim, K- T Ho, S Pary, SU Ahmed, A Ahlberg, G Cyr, PJ Vitols, A Mann, L Alexander, J Rosenblatt, J Mieres, GV Heller, AW Ahlberg, S Navare, D O’Sullivan, S Chiadika, TF Heston, MD Cerqueira, PG Jones, JR Bryngelson, KL Moutray, K Moser, MJ Zellweger, PC Burger, ME Pfisterer, J Mueller-Brand, WJ Kang, BI Lee, JC Paeng, JS Lee, J-K Chung, MC Lee, BN To, WJ O’Connell, EH Botvinick, WL Duvall, LB Croft, AJ Einstein, JE Fisher, PS Haynes, RK Rose, MJ Henzlova, A Vashist, P Sagar, Y Kuwabara, K Nakayama, Y Tsuru, J Nakaya, S Shindo, M Hasegawa, I Komuro, Y-H Liu, F Wackers, D Natale, G DePuey, R Taillefer, L Araujo, E Kostacos, S Allen, D Delbeke, F Anstett, P Kansal, JE Calvin, RC Hendel, M Gulati, P Pratap, A Takalkar, A Alavi, RM Melduni, S-A Duncan, CR Isasi, C Santana, S Esiashvili, G Grossman, H Su, LW Dobrucki, C Chow, X Hu, BN Bourke, P Cavaliere, J Hua, AJ Sinusas, FG Spinale, S Sweterlitsch, M Azure, DS Edwards, S Sudhakar, DA Chyun, LH Young, SE Inzucchi, JA Davey, FJ Wackers, GL Noble, SM Navare, J Calvert, SA Hussain, AM Ahlberg, DM Katten, WE Boden, LJ Shaw, Y Yang, A Antunes, MF Botelho, C Gomes, JJP de Lima, ML Silva, JN Moreira, S Simões, L GonÇalves, LA Providência, A Elhendy, JJ Bax, AF Schinkel, R Valkema, RT van Domburg, D Poldermans, J Arrighi, R Lampert, M Burg, R Soufer, AI Veress, JA Weiss, RH Huesman, GT Gullberg, EM Prvulovich, A van Aswegen, L Sun, J Lacy, W Jaber, G Ramakrishna, TD Miller, MK O’connor, GG Bural, A Mavi, R Kumar, G El-Haddad, SM Srinivas, null A Alavi, GS Thomas, CM Johnson, MI Miyamoto, JJ Thomas, H Majmundar, LA Ryals, ZTK Ip, HA Bishop, JP Carmody, WG Greathouse, U Igarashi, T Morishima, N Tanaka, K Takazawa, H Diedrichs, M Weber, A Koulousakis, E Voth, RHG Schwinger, HK Mohan, L Livieratos, S Gallagher, DL Bailey, J Chambers, I Fogelman, I Sobol, RJ Barst, K Nichols, A Widlitz, E Horn, J Chen, JR Galt, MK Durbin, J Ye, L Shao, J Mahenthiran, JC Elliott, S Jacob, S Stricker, VG Kalaria, S Sawada, JA Scott, K Aziz, T Yasuda, H Gewirtz, BL Hsu, K Moutray, JE Udelson, RJ Barrett, JR Johnson, C. Menenghetti, T Ruddy, SA Jenkins, J Massaro, H Haught, CS Lim, R Underwood, J Rosman, S Hanon, M Shapiro, P Schweitzer, A VanTosh, S Jones, K N Giedd, N P Johnson, J I Berliner, R R Sciacca, R L Chou, K T Hickey, S S Bokhari, O Rodriguez, KW Moser, M Nanasato, H Fujita, M Toba, T Nishimura, M Nikpour, M Urowitz, D Gladman, D Ibanez, P Harvey, J Floras, J Rouleau, R Iwanochko, ME Guglin, FL Ginsberg, M Reinig, JE Parrillo, R Cha, ME Merhige, GM Watson, JG Oliverio, V Shelton, SN Frank, AF Perna, MJ Ferreira, AI Ferrer-Antunes, V Rodrigues, F Santos, J Lima, MY Magram, MA Lodge, JW Babich, V Dilsizian, BR Line, D Skerrett, C Charles, MD Shuster, S Itescu, TS Wang, R Hosokawa, M Ohba, N Kambara, E Tadamura, S Kubo, R Nohara, T Kita, RC Thompson, AI McGhie, JH O’Keefe, SD Christenson, S Jerome, TJ Russell, DR Lowry, VJ Coombs, A Moses, SO Gottlieb, SI Heiba, G Yee, J Coppola, T Elmquist, R Braff, I Youssef, JA Ambrose, HM Abdel-Dayem, J Canto, J Scott, TE Terndrup, UR Dim, J Mclaughlin, D Pollepalle, W Schapiro, Y Wang, O Akinboboye, D Polepalle, B Phippen-Nater, J Leonardis, R Druz

Publikováno v: Journal of Nuclear Cardiology. 11:S2-S38

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::2224399e84a814db32f74ecc137ae05c
https://doi.org/10.1007/bf02974964

Gas-Phase and Surface Reactions in a Horizontal Reactor for GaN MOVPE Growth

Autor: K. Harafuji

Publikováno v: physica status solidi (a). 188:635-639

Three-dimensional simulations of gas flow and chemical reactions are made. The epitaxy model is newly developed. It is found that the gas flow rate Q is a key parameter which controls the spatial distribution of the growth rate above the susceptor. H

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::09f89ca85d837ffe90f0758d3e01739a
https://doi.org/10.1002/1521-396x(200112)188:2<635::aid-pssa635>3.0.co

Simulation study of micro-loading phenomena in silicon dioxide hole etching

Autor: K. Harafuji, A. Misaka

Publikováno v: IEEE Transactions on Electron Devices. 44:751-760

A new surface reaction model for a dry-etching topography simulator is propose. First, two types of radical adsorptions are introduced. One is a nondepositive type (Langmuir type) radical adsorption which plays an important role for ion-assisted etch

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::a6fc59cb1a0bf5ef6b8a053a43f309f2
https://doi.org/10.1109/16.568036

A novel hierarchical approach for proximity effect correction in electron beam lithography

Autor: H. Yamashita, K. Harafuji, N. Nomura, A. Misaka, M. Kawamoto

Publikováno v: IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems. 12:1508-1514

An efficient CAD pattern processing algorithm based on dose modulation technique is proposed for proximity effect correction calculation in electron beam (EB) lithography. The algorithm resolves a costly and lengthy computation during the pattern pro

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::2dc9f97f44e4b78acef77d2c81f91583
https://doi.org/10.1109/43.256925

A simulation of micro-loading phenomena in dry-etching process using a new adsorption model

Autor: M. Kubota, K. Harafuji, Hideo Nakagawa, A. Misaka

Publikováno v: Proceedings of IEEE International Electron Devices Meeting.

A new adsorption model in surface reaction of dry-etching process is proposed. The model allows the simulation of micro-loading phenomena in the etching rate, profile and selectivity of SiO/sub 2/ hole etching with hydrofluorocarbon gases. A new 2D-s

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::ff0f73b445fc8ad72a7a9217ad04eec6
https://doi.org/10.1109/iedm.1993.347265