Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Jyun Kudou"'
Autor:
Motoki Takahara, Jyun Kudou, Hidenori Ohyama, Eddy Simoen, Mutsuo Shibuya, Isao Tsunoda, Cor Claeys, Toshiyuki Nakashima, Suguru Funasaki, Kenichiro Takakura, Katsuya Murakami
Publikováno v:
Materials Science Forum. 725:269-272
For the purpose of increasing the conductivity of β-Ga2O3 films, Sn doping in the β-Ga2O3 films has been explored using co-sputtering. Growth of β-Ga2O3 was confirmed by the XRD pattern for the undoped sample. However, it is shown that the Ga2O3 p
Autor:
Toshiyuki Nakashima, Mutsuo Shibuya, Katsuya Murakami, Cor Claeys, Isao Tsunoda, Jyun Kudou, Kenichiro Takakura, Suguru Funasaki, Eddy Simoen, Hidenori Ohyama, Motoki Takahara
Publikováno v:
Materials Science Forum. 725:273-276
For the purpose of improving the crystalline quality of undoped and Si doped β-Ga2O3 films, high temperature annealing at 900°C was performed. The crystalline quality of the films investigated using scanning electron microscopy and X-ray diffractio