Zobrazeno 1 - 10
of 33
pro vyhledávání: '"Jyrki Kaitila"'
Autor:
Thomas Herzog, Mohamed Abd Allah, Robert Thalhammer, Doris Schmitt-Landsiedel, Werner Weber, Jyrki Kaitila
Publikováno v:
Solid-State Electronics. 54:1041-1046
We present a new method to manufacture solidly mounted bulk acoustic wave resonators. This new process introduces the use of wafer bonding techniques and sacrificial surface removal to manufacture solidly mounted resonators having special properties.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8e745d89ca8d68bf1411d7ae7479625e
https://doi.org/10.1016/j.sse.2010.04.031
https://doi.org/10.1016/j.sse.2010.04.031
Publikováno v:
Journal of Materials Science: Materials in Electronics. 14:431-435
Piezoelectric zinc oxide films are used in microelectromechanical systems (MEMS) applications, where they can be used in sensors to detect, e.g., pressure or acceleration. Beside sensors, ZnO films are applied in activation devices, where force is ne
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9e39fd1500bd5871bc05912fbbbe55ee
https://doi.org/10.1023/a:1023929524641
https://doi.org/10.1023/a:1023929524641
Autor:
John D. Larson, Jyrki Kaitila
Publikováno v:
2013 IEEE International Ultrasonics Symposium (IUS).
In this paper we give experimental observations of the complex valued Lamb mode in a FBAR resonator, using the AIM [1] and standard S-parameter measurements. Furthermore, a theoretical explanation of the observed behavior, based on the Berlincourt fo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7c125ab434e7c7ed573e702f6747c53f
https://doi.org/10.1109/ultsym.2013.0195
https://doi.org/10.1109/ultsym.2013.0195
Publikováno v:
2011 IEEE Radio Frequency Integrated Circuits Symposium.
We present a 22µW, 2.0GHz FBAR oscillator - the lowest power reported to date for a GHz-range oscillator of this type. Low power consumption is achieved through co-design with a high R p FBAR resonator and a weakly-forward biased bulk connection. An
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9846511ed164b31b6f0f5892a76c5f64
https://doi.org/10.1109/rfic.2011.5940708
https://doi.org/10.1109/rfic.2011.5940708
Autor:
Donald Lee, Richard C. Ruby, Steve Ortiz, Qiang Zou, Martha K. Small, Frank Bi, Yury Oshmyansky, Jyrki Kaitila
Publikováno v:
2010 IEEE International Frequency Control Symposium.
This paper demonstrates two variations of Temperature compensated (TempCo) FBAR resonators with high Kt2. One 1.5 GHz non-symmetric stack design TempCo FBAR resonator has a Kt2 of 4.28% and linear TCF of 0 ppm/°C. A second, quasi-symmetric stack des
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::52c73666b68fa49af3b848f01afb0e0a
https://doi.org/10.1109/freq.2010.5556250
https://doi.org/10.1109/freq.2010.5556250
Publikováno v:
2009 IEEE International Electron Devices Meeting (IEDM).
We propose a new way to temperature compensate solidly mounted bulk acoustic wave resonators (SMRs). With the proposed process high Q, high electromechanical coupling coefficient, fully temperature compensated resonators have been successfully fabric
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3729982c7503fc1c4cf1136e1f268720
https://doi.org/10.1109/iedm.2009.5424224
https://doi.org/10.1109/iedm.2009.5424224
Autor:
Jyrki Kaitila, Doris Schmitt-Landsiedel, Werner Weber, Thomas Herzog, Mohamed Abd Allah, Robert Thalhammer
Publikováno v:
2009 Proceedings of the European Solid State Device Research Conference.
A new process to manufacture solidly mounted bulk acoustic wave resonators using wafer bonding and sacrificial surface removal is introduced. With this process, AlN thin films are obtained having excellent c-axis orientation with XRD rocking curve FW
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::be164db96aa8dc6a66a062d177387f1d
https://doi.org/10.1109/essderc.2009.5331616
https://doi.org/10.1109/essderc.2009.5331616
Publikováno v:
2009 IEEE International Ultrasonics Symposium.
Temperature compensation is becoming more and more a high demand for RF filters in order to successfully meet the tightening specifications over a wide range of temperatures. We show our results on temperature compensation by adding thin SiO 2 layers
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::025ad248e37db154177f6dd906d4d507
https://doi.org/10.1109/ultsym.2009.5442034
https://doi.org/10.1109/ultsym.2009.5442034
Publikováno v:
IEEE Ultrasonics Symposium, 2005..
The dominant trend in mobile communication is the reduction of cost and size of the components. Bulk-Acoustic-Wave (BAW) filters are ideally suited to replace conventional RF-fil- ters for all major cell phone standards such as GSM, CDMA and WCDMA. I
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::00aaba58350ec976c8a9f437b06dae80
https://doi.org/10.1109/ultsym.2005.1603060
https://doi.org/10.1109/ultsym.2005.1603060
Publikováno v:
IEEE Ultrasonics Symposium, 2005..
The overall performance of bulk acoustic wave (BAW) filters is dominated by the effective coupling coefficient and the quality factor of the constituting BAW resonators. Whereas the effective coupling coefficient and its dependency on the layer stack
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::278ee2f4b929522c5e89815903c060b8
https://doi.org/10.1109/ultsym.2005.1602861
https://doi.org/10.1109/ultsym.2005.1602861