Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Juqun Yan"'
Publikováno v:
Measurement Science and Technology. 16:2030-2037
The characterization of straightness/coaxiality is a fundamental geometric tolerance in modern mechanical industries. Straightness measurement over a long range is difficult to implement due to atmospheric disturbance. A novel straightness/coaxiality
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::927400e5cfbfc7a9640f506831217793
https://doi.org/10.1088/0957-0233/16/10/019
https://doi.org/10.1088/0957-0233/16/10/019
Publikováno v:
Journal of Physics: Conference Series. 13:414-417
Plane mirror interferometers are usually utilized to nano-position large-range scanning stage in microelectronic mask measurement systems. To avoid Abbe-error the centerline of measurement light beams of X Y Z should be intersected at the upper surfa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::89d544e8cb2e67f71dd70a562c79f06b
https://doi.org/10.1088/1742-6596/13/1/095
https://doi.org/10.1088/1742-6596/13/1/095
Publikováno v:
International Journal of Electronics. 89:759-769
The heterodyne interferometric system based on phase measurement plays a significant role in modern metrology fields owing to its convenience of signal processing. In this paper, a phase measurement scheme to determine the fraction of the interferenc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b6eb392057eec74367702006b5661f61
https://doi.org/10.1080/0020721031000093147
https://doi.org/10.1080/0020721031000093147
Dual-frequency green laser interferometer based on a frequency stabilized 543.5nm Zeeman He-Ne laser
Publikováno v:
SPIE Proceedings.
A dual-frequency laser interferometer is established based on a frequency-stabilized 543.5nm Zeeman He-Ne laser. The interferometer has been tested in displacement measuring experiments in comparison with a commercial 632.8nm dualfrequency laser inte
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b73efa5e1b35efaeeb18ad9ff304a624
https://doi.org/10.1117/12.806697
https://doi.org/10.1117/12.806697
Publikováno v:
SPIE Proceedings.
A kind of bireflectance thin film on the window plate of a 633nm He-Ne laser is presented in this paper. The film of non quarter-wave-stack is coated on the substrate with the application of external load on it. The load on the substrate is removed a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5744b030bf9c1d94b375fb3c9e8f6b9c
https://doi.org/10.1117/12.447318
https://doi.org/10.1117/12.447318
Autor:
Juqun Yan
Publikováno v:
Chinese Journal of Mechanical Engineering (English Edition). 18:156
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::61a6f57a70bdc3ae9de5ee9cd4a92652
https://doi.org/10.3901/cjme.2005.01.156
https://doi.org/10.3901/cjme.2005.01.156
Publikováno v:
Applied Optics. 43:1472
A novel instrument, the dual-frequency interferometric confocal microscope (DICM), which facilitates the measurement of step features, is investigated. It combines the advantages of the high resolution (subnanometer) of heterodyne interferometry and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::701cc8a367c42e83935e686b4587f193
https://doi.org/10.1364/ao.43.001472
https://doi.org/10.1364/ao.43.001472