Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Junhyun Seo"'
Publikováno v:
Journal of Nanoelectronics and Optoelectronics. 11:103-107
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::554a6cb52dec0569363622d3bdac5413
https://doi.org/10.1166/jno.2016.1876
https://doi.org/10.1166/jno.2016.1876
Autor:
Byungwhan Kim, Junhyun Seo
Publikováno v:
Applied Surface Science. 359:204-208
We present a novel method capable of measuring surface roughness of deposited thin films. The method was tested with 4 sets of SiN thin films deposited using a plasma-enhanced chemical vapor deposition system. The range of surface roughness measured
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c57b6341c6a080f6cc8150bb6db7a344
https://doi.org/10.1016/j.apsusc.2015.10.070
https://doi.org/10.1016/j.apsusc.2015.10.070
Publikováno v:
Journal of nanoscience and nanotechnology. 14(10)
We present a dark field microscopy for the measurement of film surface roughness. The underlying principle is that a darker region in a film surface represents a deeper place from the top surface. The performance of the imaging system was demonstrate
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9b8fc19530bccbd1f21be45b7753ffa6
https://pubmed.ncbi.nlm.nih.gov/25942839
https://pubmed.ncbi.nlm.nih.gov/25942839