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pro vyhledávání: '"Jun Sonobe"'
Publikováno v:
ACS Omega, Vol 5, Iss 29, Pp 17926-17930 (2020)
Externí odkaz:
https://doaj.org/article/448f455ac8c74584b0237ea9406422fd
Publikováno v:
ACS Omega
ACS Omega, Vol 5, Iss 29, Pp 17926-17930 (2020)
ACS Omega, Vol 5, Iss 29, Pp 17926-17930 (2020)
Pure gases and mixtures containing stable isotopes are used in a wide variety of applications including health care, food authentication, geochemistry, and environmental monitoring. It is therefore important to understand the role of moisture, which
Publikováno v:
Journal of the Japan Society of Colour Material. 63:385-391
Publikováno v:
NIPPON KAGAKU KAISHI. :770-776
アスファルテンの水素化分解反応におけるコバルトフタロシアニン(PC)型化合物の触媒効果について,PC型化合物の分子構造の違いによる影響に関して実験を行った。触媒には・cobalttetrapyri
Autor:
Jun Sonobe, Takamitsu Shigemoto
Publikováno v:
ECS Meeting Abstracts. :1014-1014
We describe improved gas mixtures for the thermal cleaning of low pressure CVD reactors used for silicon nitride deposition. F2 and HF mixture are widely used for thermal chamber cleaning today, however the F utilization rate is low, and the required