Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Jun Hyup Sun"'
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 18:417-422
A tungsten (W) etch process in a SF6 helicon plasma has been modeled using neural networks. The process was characterized by a 24−1 fractional factorial experimental design. The design factors that were varied include source power, bias power, chuc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::faee0d497376e378f7d903c5ddb02175
https://doi.org/10.1116/1.582203
https://doi.org/10.1116/1.582203
