Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Jun Hyeon Moon"'
Publikováno v:
Physics of Plasmas. 29:013510
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::015d9a2d30e696ebda57ce3720e28b0a
https://doi.org/10.1063/5.0064438
https://doi.org/10.1063/5.0064438
Publikováno v:
Journal of Applied Physics. 129:103305
The effects of external discharge parameters (applied RF power, operating pressure, and gas flow rate) on ion flux uniformity are investigated in a dual inductively coupled plasma. The ion fluxes and electron temperatures are measured using a Langmui
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::56e635d868422b81ab9d6a9dc8abba57
https://doi.org/10.1063/5.0026248
https://doi.org/10.1063/5.0026248
Publikováno v:
Physics of Plasmas. 27:093504
We developed a hybrid plasma source combined with an inductively coupled plasma (ICP) antenna and a capacitively coupled plasma (CCP) electrode. The ICP antenna and the CCP electrode are connected to a single RF power generator in parallel and a vari
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2afae8a1852b4eee5bb65ac710d426f4
https://doi.org/10.1063/5.0006417
https://doi.org/10.1063/5.0006417
Publikováno v:
Physics of Plasmas. 27:033511
A hysteresis loop has been observed during the E–H mode transition in an inductively coupled plasma at high pressures. The cause of the hysteresis has been reported as a nonlinearity of the transferred and dissipated powers due to capacitive coupli
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6db30d7dd44da41bbf5eed82d6e602af
https://doi.org/10.1063/1.5133449
https://doi.org/10.1063/1.5133449
Publikováno v:
Physics of Plasmas. 26:093505
The E to H mode transition is one of the most interesting phenomena in inductively coupled plasmas, and there is substantial evidence to show that the mode transition occurs. During the E–H mode transition, in a certain discharge condition such as
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::961fd35c52a7e4959b76d1b46715d7e4
https://doi.org/10.1063/1.5099290
https://doi.org/10.1063/1.5099290
Publikováno v:
Physics of Plasmas. 23:113504
The number of antenna coil turns, N, that affects the plasma density is a significant factor to design an inductively coupled plasma source. The equivalent resistance and inductance of a transformer circuit seen at the antenna coil are known to incre
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d78d8653a9169dca7ddf80b2ad2ce0a7
https://doi.org/10.1063/1.4967772
https://doi.org/10.1063/1.4967772
Autor:
Yu-Sin Kim, Guangsup Cho, Yunjung Kim, Jun-Hyeon Moon, Young-Cheol Kim, Chin-Wook Chung, Hyo-Chang Lee
Publikováno v:
Physics of Plasmas. 22:083511
The electrical probe diagnostics are very hard to be applied to atmospheric plasmas due to severe perturbation by the electrical probes. To overcome this, the probe for measuring electron temperature and ion current density is indirectly contacted wi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6586783b07a8b8b9740ee39db5eb5a92
https://doi.org/10.1063/1.4928440
https://doi.org/10.1063/1.4928440
Publikováno v:
Physics of Plasmas; 2016, Vol. 23 Issue 11, p1-5, 5p, 1 Diagram, 7 Graphs
Autor:
Young-Cheol Kim, Yu-Sin Kim, Hyo-Chang Lee, Jun-Hyeon Moon, Chin-Wook Chung, Yunjung Kim, Guangsup Cho
Publikováno v:
Physics of Plasmas; Aug2015, Vol. 22 Issue 8, p1-6, 6p, 2 Diagrams, 4 Graphs