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Publikováno v:
Journal of Micromechanics and Microengineering. 21:065030
In this paper, we explore microfabricated bistable actuators released as thin films from a silicon wafer. The actuators are based on a serpentine design where two cantilevers are coupled at the tips by a thin-film bar. These devices are parameterized
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a40663ce663b222ce9b178d1f1eafab1
https://doi.org/10.1088/0960-1317/21/6/065030
https://doi.org/10.1088/0960-1317/21/6/065030
