Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Jui-Chin Yang"'
Autor:
Hsueh-Jen Tsai, Chia-Hung Chen, Myungjun Lee, Kuo-Yao Chou, Mark D. Smith, Jo-Lan Chin, Jen-Chou Huang, Hao-Lun Huang, Chen Dror, Healthy Huang, Jui-Chin Yang, Yuan-Ku Lan, Michael E. Adel, Harvey Cheng, Jinyan Song, Tal Itzkovich, Ady Levy, Yaniv Abramovitz, Chin-Chang Huang, I-Lin Wang, Hsien-Yen Lung
Publikováno v:
SPIE Proceedings.
We present a novel metrology target design framework using the scanner exit pupil wavefront analysis together with Zernike sensitivity analysis (ZSA) based on the Monte-Carlo technique. The proposed method enables the design of robust metrology targe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f7fce7d6ac86885d3ff9888443f23af9
https://doi.org/10.1117/12.2218659
https://doi.org/10.1117/12.2218659
Autor:
Cathy Wang, Wythe Lin, Ray C. Chang, Jui-Chin Yang, Chi-Chun Lin, Chia-Hung Chen, Chia-Chi Chen
Publikováno v:
SPIE Proceedings.
The etch loading effect from wafer center to wafer edge results in worse Bit-line Contact layer (CB) to Gate Conductor layer (GC) overlay alignment performance at the wafer edge which directly impacts device yield. One workaround for this is to intro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fbea3dff79099c70b6de55e20b48f0fb
https://doi.org/10.1117/12.806643
https://doi.org/10.1117/12.806643
Autor:
Jui-chin Yang, 楊瑞琴
96
The main purpose of this study was to investigate the process, difficulties and effects through implementing thematic teaching in a Montessori classroom. Qualitative data were collected and analyzed children and teachers in Sweety class of Hu
The main purpose of this study was to investigate the process, difficulties and effects through implementing thematic teaching in a Montessori classroom. Qualitative data were collected and analyzed children and teachers in Sweety class of Hu
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/60921233231621699525
