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pro vyhledávání: '"Juergen Eindorf"'
Autor:
Ernst Haugeneder, Maati Talmi, Juergen Saniter, Juergen Eindorf, Alexander Reisig, Sven-Hendrik Voss, Joachim Heinitz
Advantageous optical interconnect technology was chosen for the projection mask-less lithography application to transmit the exposure data to the blanking plate electronics inside a high-voltage vacuum area. Ensuring continuous and reliable operation
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::12db0b36577ce66669e5a5e35b0e711c
https://publica.fraunhofer.de/handle/publica/211452
https://publica.fraunhofer.de/handle/publica/211452