Zobrazeno 1 - 10
of 36
pro vyhledávání: '"Ju Hyun Myung"'
Publikováno v:
Vacuum. 82:1400-1403
We have demonstrated the structural and morphological changes of iridium oxide (IrO 2 ) films by the thermal annealing process. We have characterized the samples by using the X-ray diffraction (XRD), scanning electron microscopy (SEM), and energy dis
Publikováno v:
Materials Science Forum. 518:143-148
In2O3 materials consisting of dense arrays of vertically aligned rod-like structures were deposited on sapphire substrates by thermal chemical vapor deposition (CVD) using triethylindium (TEI) and oxygen as precursors at a substrate temperature of 35
Publikováno v:
Materials Science Forum. :654-657
We have synthesized gallium oxide (Ga2O3) nanomaterials at two different growth temperatures on iridium (Ir)-coated substrates by thermal evaporation of GaN powders. The products consist mainly of nanobelts, with some additional nanosheets. The nanob
Publikováno v:
Materials Science Forum. :658-661
One-dimensional structures of tin oxide (SnO2) on TiN-coated substrates were obtained by simple heating of Sn powders. X-ray diffraction, high-resolution transmission electron microscopy, and the selected area electron diffraction showed that 1D stru
Publikováno v:
Materials Science Forum. :146-149
We report on the first synthesis of nanosized In2O3 rods using the TEI as a precursor in the presence of oxygen. The samples were characterized by means of X-ray diffraction (XRD), scanning electron microscopy (SEM), and energy-dispersive X-ray spect
Autor:
Wan Jae Park, Chung-Gon Yoo, Hyoun Woo Kim, Chin-Wook Chung, Dae-Kyu Choi, Chang-Jin Kang, Nam Ho Kim, Ju Hyun Myung
Publikováno v:
Vacuum. 80:193-197
The characteristics of photoresist (PR) ashing using N 2 plasmas in a ferrite core inductively coupled plasma etcher have been studied and the effect of bias power and gas flow rate on PR ash rate and low- k material etch rate has been investigated.
Publikováno v:
physica status solidi (a). 202:1758-1762
We have successfully grown the tin oxide (SnO2) fishbone-like nanostructures on titanium nitride (TiN)-coated substrates by the thermal evaporation of Sn powders. X-ray diffraction indicated that the product had the phase structure of the rutile form
Publikováno v:
Materials Science Forum. :1825-1828
We have demonstrated the growth of ZnO thin films with c-axis orientation at room temperature on various substrates such as Si(100), SiO2, and sapphire by the r.f. magnetron sputtering method. X-ray diffraction (XRD) and scanning electron microscopy
Publikováno v:
physica status solidi (a). 202:108-112
We have deposited indium oxide (In 2 O 3 ) films on silicon substrates by the metal organic chemical vapor deposition (MOCVD). We have investigated the effect of substrate temperature on growth and structural properties of films in the range of 200-3
Autor:
Hyoun Woo Kim, Ju Hyun Myung
Publikováno v:
Key Engineering Materials. :637-639
We have prepared the gallium oxide (Ga2O3) films on sapphire substrates by a thermal evaporation of GaN powders. We have characterized the films by using the x-ray diffraction (XRD), scanning electron microscopy (SEM), and the photoluminescence (PL).