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pro vyhledávání: '"Joung-June Park"'
Publikováno v:
1996 IEEE International SOI Conference Proceedings.
We developed a new SOI device with a self-aligned polysilicon gate on the recessed channel region and obtained low source/drain resistance, symmetrical I/sub D/-V/sub DS/ characteristics and high breakdown voltage (BV/sub DSS/). The self-alignment wa
Publikováno v:
1996 IEEE International SOI Conference Proceedings; 1996, p122-123, 2p