Zobrazeno 1 - 10
of 34
pro vyhledávání: '"Joshua Lessing"'
Publikováno v:
Journal of Media Law. 5:104-132
The 9/11 terrorist attacks in the United States triggered an escalation of national security laws globally, including at least 54 in Australia, with some having implications for news reporting and open justice. This article backgrounds the Australian
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::087a2a686ae1b97f0e39637b50372be1
https://doi.org/10.5235/17577632.5.1.104
https://doi.org/10.5235/17577632.5.1.104
Publikováno v:
SPIE Proceedings.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8f45cb6f8aca7a6a0196a4daa0d461ab
https://doi.org/10.1117/12.518319
https://doi.org/10.1117/12.518319
Publikováno v:
SPIE Proceedings.
As advanced photolithography extends the ability to print feature sizes below the 100 nm technology node, various reticle enhancement techniques (RET) are being employed to improve resolution. An example of RET is the alternating phase shift mask (AP
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::158706880825fb973ea29d8751900702
https://doi.org/10.1117/12.504211
https://doi.org/10.1117/12.504211
Publikováno v:
21st Annual BACUS Symposium on Photomask Technology.
In this paper, we will be discussing the repair of 193 nm Molybdenum Silicide (MoSiON) phase-shift masks by Focused Ion Beam (FIB) technology. Development of a next generation FIB column has allowed greater resolution of photomask patterns enabling e
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::21bcf4e6ff719bb7c50a13fce7112d79
https://doi.org/10.1117/12.458283
https://doi.org/10.1117/12.458283
Autor:
Jeff Kuo, Diane K. Stewart, Joshua Lessing, David C. Ferranti, Ching Siun Chiu, John C. Morgan
Publikováno v:
SPIE Proceedings.
Binary chrome masks with optical proximity corrections (OPC) will be used to produce devices for the 0.18 micron generation. The complex shapes of OPC features make automated inspection and repair difficult. Specifically it is difficult to recognize
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::67936d77d29a29eb89aa238634f8f027
https://doi.org/10.1117/12.373359
https://doi.org/10.1117/12.373359
Publikováno v:
SPIE Proceedings.
As advanced photolithography moves the printable feature size from 0.25 micrometer to 0.18 micrometer various mask types are being used to improve resolution. One example is the attenuated phase shift MoSiON mask. This in turn requires the developmen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::426df3e35402c4b980b0a9fad268bae1
https://doi.org/10.1117/12.360232
https://doi.org/10.1117/12.360232
Autor:
J. David Casey, Mark L. Raphaelian, K. Rose, Roy White, M. F. Ellis, Diane K. Stewart, David C. Ferranti, Andrew F. Doyle, Joshua Lessing, Don Carolan
Publikováno v:
SPIE Proceedings.
On the standard Micrion 8000 PM Repair System platform, the repair accuracy for clear defect repair and opaque defect repair is plus or minus 75 nm. Incorporation of a new ion beam column has pushed the repair accuracy for clear and opaque defect rep
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e75f56e92c567911f0f53c0599e36155
https://doi.org/10.1117/12.301220
https://doi.org/10.1117/12.301220
Autor:
Stephen S. Murray, Kathryn A. Flanagan, Vincent D. Rose, Martin V. Zombeck, Joshua Lessing, Rachel K. Roll, D. Kearns
Publikováno v:
SPIE Proceedings.
The Advanced X-Ray Astrophysics Facility (AXAF) is a high spatial resolution X-ray observatory scheduled for launch in 1998. One of its two focal plane instruments is the High Resolution Camera (HRC). The HRC consists of two microchannel plate detect
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fcf0a22f6f5e260fdf5cfeddb05f5aa5
https://doi.org/10.1117/12.186835
https://doi.org/10.1117/12.186835
Autor:
Rachel K. Roll, A. Viola, D. Kearns, Stephen S. Murray, Joshua Lessing, G. Germaine, Randall W. Moore, Kathryn A. Flanagan, Joaquim J. Gomes, Martin V. Zombeck
Publikováno v:
X-Ray Detector Physics and Applications II.
The high resolution camera (HRC) is a set of microchannel plate based detectors designed to fly aboard the Advanced X-Ray Astrophysics Facility (AXAF), one of the `Great Observatories' under the auspices of NASA. The HRC is designed in two configurat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a13a5434413de6a3ebab78e89a4be9c0
https://doi.org/10.1117/12.164747
https://doi.org/10.1117/12.164747
Publikováno v:
Journal of Physical Chemistry A; Mar2008, Vol. 112 Issue 11, p2282-2292, 11p