Výsledky vyhledávání - "Josh Rodgers"

Uniformity and Morphology of 10 x 100mm 4° Off-Axis 4H-SiC Epitaxial Layers and their Effect on Device Performance

Autor: Janna R. B. Casady, Hrishikesh Das, Swapna Sunkari, Josh Rodgers, Timothy R. Oldham

Publikováno v: Materials Science Forum. :221-224

Homoepitaxial layers with very good thickness and doping uniformity were grown on 4 inch 4˚ off-axis substrates in a 10x100mm planetary reactor. Process optimizations resulted in reduction of the size of the triangular defects. Aggressive pre-etchin

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::278db42a19072ea1e7e0eb5fbb6fa385
https://doi.org/10.4028/www.scientific.net/msf.740-742.221

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Reduction of Triangular Defects on 100mm 4° off-axis 4H-SiC using a Chloride Based CVD process

Autor: Josh Rodgers, Janna R. B. Casady, Timothy R. Oldham, Hrishikesh Das, Swapna Sunkari

Publikováno v: MRS Proceedings. 1433

Homoepitaxial layers were grown with very low surface roughness on 4", 4˚ off-axis substrates, but a new kind of large obtuse angled triangular defect that spanned 1000-2000 μm was observed. Process changes resulted in reduction of the size and con

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::9d2a4d500d5b13ff16f17e86bec11c4a
https://doi.org/10.1557/opl.2012.1055

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