Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Joseph Valinski"'
Publikováno v:
MRS Advances. 7:1482-1485
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dc8f94bc1a51624472029c88182cc866
https://doi.org/10.1557/s43580-022-00446-5
https://doi.org/10.1557/s43580-022-00446-5
Publikováno v:
2014 20th International Conference on Ion Implantation Technology (IIT).
As a member of the Purion ion implanter family, Purion H is Axcelis' next generation high current implanter. Purion H provides customers with an unprecedented level of process flexibility and yield-enabling technology, and features the platform's fou
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::60489733044f17ea89a9089db19755ad
https://doi.org/10.1109/iit.2014.6940041
https://doi.org/10.1109/iit.2014.6940041