Zobrazeno 1 - 10
of 49
pro vyhledávání: '"Joseph C. Davis"'
Autor:
Christian F. Zirbes, Nicholas J. Pitcher, Joseph C. Davis, Alyssa R. Bartels, Justin D. Krogh, Mary Teresi, Tyler Farber, Francesca Milavetz, Anthony J. Pamatmat, Alexis L. Rozen, Lindsey D. Reinhardt, Linda Boyken, Sachinkumar B. Singh, Erik Twait, Valérie C. Reeb, Bradley A. Ford, Anthony J. Fischer
Publikováno v:
Journal of cystic fibrosis : official journal of the European Cystic Fibrosis Society. 21(5)
Publikováno v:
Journal of the American Statistical Association. 93:36-45
Material is deposited onto the wafer surface during several steps of wafer fabrication. This material must be deposited evenly across the entire wafer surface, close to the targeted thickness, and with little wafer-to-wafer variability. But unequal v
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 11:583-590
In this paper, we present techniques that can be used to answer the following two questions: (1) how many wafers need to be allocated per treatment to detect a given difference in a device performance metric and (2) how can one determine if a given t
Autor:
P.P. Apte, Sharad Saxena, R. Burch, Joseph C. Davis, Karthik Vasanth, P.K. Mozumder, S. Rao, C. Fernando
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 11:527-536
Run-to-run and supervisory control algorithms determine the equipment recipe to produce a desired output wafer state given the incoming wafer state and the current equipment model. For simple, low-dimensional equipment models, this problem is not dif
Autor:
Jye-Chyi Lu, P.K. Mozumder, H.H. Heinisch, E.A. Rying, B.E. Hornung, S. Rao, Joseph C. Davis, R.S. Gyurcsik, Jimmie J. Wortman, M.M. Gardner
Publikováno v:
IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part C. 20:295-304
This paper describes a new methodology for equipment fault detection. The key features of this methodology are that it allows for the incorporation of spatial information and that it can be used to detect and diagnose equipment faults simultaneously.
Publikováno v:
Journal of The Electrochemical Society. 143:3404-3409
Modern statistical modeling techniques for characterizing the spatial response of a single-wafer, process are presented. These techniques overcome the limitations of the commonly used ordinary least squares estimation procedure and provide models for
Publikováno v:
IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part C. 19:283-289
Within-wafer uniformity is traditionally measured by the signal-to-noise ratio (SNR), defined as the estimated standard-deviation of within-wafer measurements over the mean of those measurements, Unfortunately, in the presence of deterministic variat
Publikováno v:
Proceedings of the Human Factors and Ergonomics Society Annual Meeting. 39:610-614
This study investigated selective activation of different regions of the external obliques. Six subjects performed sub-maximal isometric axial twisting exertions (20%, 40%, 60% of MVC) while assuming six different postures defined by three levels of
Publikováno v:
Proceedings of the Human Factors and Ergonomics Society Annual Meeting. 38:644-648
The National Institute for Occupational Safety and Health (NIOSH) has increased the applicability of its lifting equation to a wider range of jobs by relaxing some of the simplifying assumptions of the original equation. Specifically, NIOSH has added
Publikováno v:
SPIE Proceedings.
The OASIS working group was first initiated in 2001, published the new format in March 2004, which was ratified as an official SEMI standard in September 2005. A follow-on initiative expanded the new standard to cover the needs of the mask manufactur