Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Josef Zuercher"'
Publikováno v:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII.
Publikováno v:
Materials; Volume 15; Issue 13; Pages: 4506
In the paper, we study the formation of laser-induced periodic surface structures (LIPSS) on diamond-like nanocomposite (DLN) a-C:H:Si:O films during nanoscale ablation processing at low fluences—below the single-pulse graphitization and spallation
Publikováno v:
Materials (Basel, Switzerland). 15(13)
In the paper, we study the formation of laser-induced periodic surface structures (LIPSS) on diamond-like nanocomposite (DLN) a-C:H:Si:O films during nanoscale ablation processing at low fluences-below the single-pulse graphitization and spallation t